发明授权
US4939065A UV-curable organopolysiloxane compositions and negative photoresists comprised thereof 失效
可UV固化的有机基聚硅氧烷组合物和由其组成的负性光致抗蚀剂

UV-curable organopolysiloxane compositions and negative photoresists
comprised thereof
摘要:
Substrates, e.g., silicon wafers, coated with a UV-curable organopolysiloxane composition including a crosslinking catalyst therefor (e.g., a platinum group metal compound) and an amount of a crosslinking inhibitor (e.g., an azodicarboxylate) which is effective at ambient temperature, but ineffective to prevent crosslinking on exposure of the composition to ultraviolet radiation, are well adapted for the imaging of negative intelligence patterns thereon.
公开/授权文献
信息查询
0/0