发明授权
US4939065A UV-curable organopolysiloxane compositions and negative photoresists
comprised thereof
失效
可UV固化的有机基聚硅氧烷组合物和由其组成的负性光致抗蚀剂
- 专利标题: UV-curable organopolysiloxane compositions and negative photoresists comprised thereof
- 专利标题(中): 可UV固化的有机基聚硅氧烷组合物和由其组成的负性光致抗蚀剂
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申请号: US217498申请日: 1988-07-11
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公开(公告)号: US4939065A公开(公告)日: 1990-07-03
- 发明人: Jacques Cavezzan , Sylvianne Dumas , Louis Giral , Christian Prud'Homme , Francois Schue
- 申请人: Jacques Cavezzan , Sylvianne Dumas , Louis Giral , Christian Prud'Homme , Francois Schue
- 申请人地址: NY Ardsley
- 专利权人: Ciba-Geigy Corporation
- 当前专利权人: Ciba-Geigy Corporation
- 当前专利权人地址: NY Ardsley
- 优先权: FRX86/05483 19860414
- 主分类号: C08K3/00
- IPC分类号: C08K3/00 ; C08K5/23 ; C08L83/05 ; C08L83/07 ; G03F7/038 ; G03F7/075
摘要:
Substrates, e.g., silicon wafers, coated with a UV-curable organopolysiloxane composition including a crosslinking catalyst therefor (e.g., a platinum group metal compound) and an amount of a crosslinking inhibitor (e.g., an azodicarboxylate) which is effective at ambient temperature, but ineffective to prevent crosslinking on exposure of the composition to ultraviolet radiation, are well adapted for the imaging of negative intelligence patterns thereon.
公开/授权文献
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