发明授权
- 专利标题: Process for manufacturing a vibrating type transducer
- 专利标题(中): 制造振动型传感器的方法
-
申请号: US424510申请日: 1989-10-20
-
公开(公告)号: US4966649A公开(公告)日: 1990-10-30
- 发明人: Kinji Harada , Kyoichi Ikeda , Hideki Kuwayama , Takashi Kobayashi , Tadashi Nishikawa , Tetsuya Watanabe , Takashi Yoshida
- 申请人: Kinji Harada , Kyoichi Ikeda , Hideki Kuwayama , Takashi Kobayashi , Tadashi Nishikawa , Tetsuya Watanabe , Takashi Yoshida
- 申请人地址: JPX Tokyo
- 专利权人: Yokogawa Electric Corporation
- 当前专利权人: Yokogawa Electric Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX63-129671 19880527
- 主分类号: G01L1/10
- IPC分类号: G01L1/10 ; G01H13/00 ; G01L9/00 ; H01L29/84 ; H03B5/30 ; H03H9/17
摘要:
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.