摘要:
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.
摘要:
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.
摘要:
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.
摘要:
A semiconductor differential pressure measuring device comprising two measurement diaphragms and two detection sensors provided in a semiconductor substrate using micromachining techniques, and a computing circuit which computes the differences between the two sensor outputs, wherein a communicating hole is provided for applying pressure to each diaphragm so that the diaphragms operate in opposite phases by differential pressure, and two detecting sensors are provided on each diaphragm for detecting displacement or strain of each diaphragm caused by the differential pressure applied to the respective diaphragm, whereby detecting the differences in displacement or strain cancels the static pressure error and temperature error so that the invention has excellent temperature and static pressure characteristics, and whereby the computing circuit comprises a bridge using the two detecting sensors, which substantially reduces the cost of the device.
摘要:
A vibration transducer includes a silicon single crystal vibration beam provided over a silicon single crystal substrate, the vibration beam having a sectional shape that is longer in a direction perpendicular to a surface of the silicon single crystal substrate than in a direction parallel with it, a shell made of silicon, surrounding the vibration beam with a gap, and forming a vacuum room together with the silicon single crystal substrate, a plate-like first electrode plate disposed parallel with the surface of the silicon single crystal substrate, the first electrode plate having one end connected to the vibration beam, plate-like second and third electrode plates disposed parallel with the surface of the silicon single crystal substrate so as to be opposed to each other with the vibration beam interposed in between, and asperities formed on confronting side surfaces of the vibration beam and the second and third electrode plates.
摘要:
A gas fuel injection valve is provided in which a single nozzle member (11) is fixedly provided in a front end part of a valve housing (2), and this nozzle member (11) has formed therein a valve seat (13), a valve hole (45) extending through a central part of the valve seat (13), a throttle hole (46) having a smaller diameter than that of the valve hole (45) and communicating with an outlet of the valve hole (45), and a nozzle hole (48) having a larger diameter than that of the throttle hole (46) and communicating with an outlet of the throttle hole (46), wherein when an internal diameter of the throttle hole (46) is D1, a length of the hole (46) is L1, an internal diameter of the nozzle hole (48) is D2, and a length of the nozzle hole (48) is L2, L1/D1>1 (1) 1
摘要:
A magazine detachably installed in a main body of a disc changer is divided into sections by partitions for storing a large number of optical discs. The magazine is provided with a belt set around rollers, which carries the optical disc in contact with the belt. In the disc changer, the belt is rotated by a gear of the roller, which is engaged with an external drive gear for taking the optical disc through rotating movement. Among the optical discs which have been taken, a target optical disc opposite the slit of the disc control plate passes through the slit, and the other optical discs stop while abutting against the disc control plate. The optical disc which has passed through the slit is inserted into disc carriage rollers, and further carried to the drive for recording/reproducing.
摘要:
A control device for controlling a vehicle drive device includes a rotary electric machine in a transmission path connecting a combustion engine with wheels; a first friction engagement device between the combustion engine and the rotary machine; and a second friction engagement device between the rotary machine and wheels. The control device shifts the first and second engagement devices from a state in which the first engagement device is disengaged and the second engagement device is in direct engagement so that force is transmitted between the rotary machine and wheels, to a state in which force is transmitted at least between the combustion engine and wheels, by shifting the second engagement device from direct engagement to a slip state and thereafter shifting the first engagement device from disengaged to engaged. After the state is changed, the control device shifts the second engagement device from slip engagement to direct engagement.
摘要:
The present invention relates to a control device that controls a vehicle drive device in which a rotary electric machine is provided in a power transfer path that connects between an internal combustion engine and wheels and in which a first friction engagement device is provided between the internal combustion engine and the rotary electric machine and a second friction engagement device is provided between the rotary electric machine and the wheels.