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218 条记录 (耗时 0.03 秒)

    Vibrating type transducer
    1.
    发明授权
    Vibrating type transducer 失效
    振动式传感器

    公开(公告)号：US5009108A

    公开(公告)日：1991-04-23

    申请号：US423042

    申请日：1989-10-18

    申请人： Kinji Harada ,  Kyoichi Ikeda ,  Hideki Kuwayama ,  Takashi Kobayashi ,  Tadashi Nishikawa ,  Tetsuya Watanabe ,  Takashi Yoshida

    发明人： Kinji Harada ,  Kyoichi Ikeda ,  Hideki Kuwayama ,  Takashi Kobayashi ,  Tadashi Nishikawa ,  Tetsuya Watanabe ,  Takashi Yoshida

    IPC分类号： G01K7/32 ,  G01L9/00 ,  H04R23/00

    CPC分类号： G01L9/0019 ,  G01K7/32 ,  H04R23/006

    摘要： A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.

    摘要翻译： 一种振动型换能器，其中与硅衬底一体形成并且具有设置在其周围的中空腔的H形振动器与放大器一起以其固有谐振频率自振荡。 通过对应于物理量的振动器产生的固有频率的变化来检测施加到硅衬底的力，压力，压差等的物理量。 本发明还包括一种使用半导体技术制造这种换能器的方法，包括在中空室中内部保持真空，向振动器施加初始张力，然后操作放大器以使其具有稳定的自振荡的步骤。

    Process for manufacturing a vibrating type transducer
    2.
    发明授权
    Process for manufacturing a vibrating type transducer 失效
    制造振动型传感器的方法

    公开(公告)号：US4966649A

    公开(公告)日：1990-10-30

    申请号：US424510

    申请日：1989-10-20

    申请人： Kinji Harada ,  Kyoichi Ikeda ,  Hideki Kuwayama ,  Takashi Kobayashi ,  Tadashi Nishikawa ,  Tetsuya Watanabe ,  Takashi Yoshida

    发明人： Kinji Harada ,  Kyoichi Ikeda ,  Hideki Kuwayama ,  Takashi Kobayashi ,  Tadashi Nishikawa ,  Tetsuya Watanabe ,  Takashi Yoshida

    IPC分类号： G01L1/10 ,  G01H13/00 ,  G01L9/00 ,  H01L29/84 ,  H03B5/30 ,  H03H9/17

    CPC分类号： G01H13/00 ,  G01L9/0019 ,  Y10T29/49103

    摘要： A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.

    摘要翻译： 一种振动型换能器，其中与硅衬底一体形成并且具有设置在其周围的中空腔的H形振动器与放大器一起以其固有谐振频率自振荡。 通过对应于物理量的振动器产生的固有频率的变化来检测施加到硅衬底的力，压力，压差等的物理量。 本发明还包括一种使用半导体技术制造这种换能器的方法，包括在中空室中内部保持真空，向振动器施加初始张力，然后操作放大器以使其具有稳定的自振荡的步骤。

    Oscillator using H-shaped single crystal silicon vibrator
    3.
    发明授权
    Oscillator using H-shaped single crystal silicon vibrator 失效
    振荡器采用H型单晶硅振荡器

    公开(公告)号：US4926143A

    公开(公告)日：1990-05-15

    申请号：US245681

    申请日：1988-09-16

    申请人： Kinji Harada ,  Kyoichi Ikeda ,  Hideki Kuwayama ,  Takashi Kobayashi ,  Tadashi Nishikawa ,  Tetsuya Watanabe ,  Takashi Yoshida

    发明人： Kinji Harada ,  Kyoichi Ikeda ,  Hideki Kuwayama ,  Takashi Kobayashi ,  Tadashi Nishikawa ,  Tetsuya Watanabe ,  Takashi Yoshida

    IPC分类号： G01L1/10 ,  G01H13/00 ,  G01L9/00 ,  H01L29/84 ,  H03B5/30 ,  H03H9/17

    CPC分类号： G01H13/00 ,  G01L9/0019 ,  Y10T29/49103

    摘要： A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.

    摘要翻译： 一种振动型换能器，其中与硅衬底一体形成并且具有设置在其周围的中空腔的H形振动器与放大器一起以其固有谐振频率自振荡。 通过对应于物理量的振动器产生的固有频率的变化来检测施加到硅衬底的力，压力，压差等的物理量。 本发明还包括一种使用半导体技术制造这种换能器的方法，包括在中空室中内部保持真空，向振动器施加初始张力，然后操作放大器以使其具有稳定的自振荡的步骤。

    Semiconductor differential pressure measuring device
    4.
    发明授权
    Semiconductor differential pressure measuring device 失效
    半导体差压测量装置

    公开(公告)号：US5959213A

    公开(公告)日：1999-09-28

    申请号：US891105

    申请日：1997-07-10

    申请人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Satoshi Fukuhara ,  Takashi Yoshida ,  Hideo Tsukamoto

    发明人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Satoshi Fukuhara ,  Takashi Yoshida ,  Hideo Tsukamoto

    IPC分类号： G01L9/00 ,  G01L9/06 ,  G01L13/02 ,  G01L19/04 ,  G01L9/04

    CPC分类号： G01L13/025 ,  G01L15/00 ,  G01L9/0054 ,  G01L9/045

    摘要： A semiconductor differential pressure measuring device comprising two measurement diaphragms and two detection sensors provided in a semiconductor substrate using micromachining techniques, and a computing circuit which computes the differences between the two sensor outputs, wherein a communicating hole is provided for applying pressure to each diaphragm so that the diaphragms operate in opposite phases by differential pressure, and two detecting sensors are provided on each diaphragm for detecting displacement or strain of each diaphragm caused by the differential pressure applied to the respective diaphragm, whereby detecting the differences in displacement or strain cancels the static pressure error and temperature error so that the invention has excellent temperature and static pressure characteristics, and whereby the computing circuit comprises a bridge using the two detecting sensors, which substantially reduces the cost of the device.

    摘要翻译： 一种半导体差压测量装置，包括使用微加工技术设置在半导体衬底中的两个测量膜片和两个检测传感器，以及计算电路，其计算两个传感器输出之间的差异，其中设置有用于向每个隔膜施加压力的连通孔 膜片通过差压在相反的相位下工作，并且在每个隔膜上设置两个检测传感器，用于检测由施加到各个隔膜的差压引起的每个隔膜的位移或应变，由此检测位移或应变的差异消除了静态 压力误差和温度误差，使得本发明具有优异的温度和静压特性，并且由此计算电路包括使用两个检测传感器的桥，这大大降低了装置的成本。

    Semiconductor type differential pressure measurement apparatus and method for manufacturing the same
    5.
    发明授权
    Semiconductor type differential pressure measurement apparatus and method for manufacturing the same 失效
    半导体型差压测量装置及其制造方法

    公开(公告)号：US5375473A

    公开(公告)日：1994-12-27

    申请号：US110582

    申请日：1993-08-24

    申请人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Hideo Tsukamoto ,  Takahiro Kudo ,  Kouji Nagai ,  Satoshi Fukuhara

    发明人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Hideo Tsukamoto ,  Takahiro Kudo ,  Kouji Nagai ,  Satoshi Fukuhara

    IPC分类号： G01L9/00 ,  G01L19/06 ,  G01L9/04

    CPC分类号： G01L19/0618 ,  G01L19/0636 ,  G01L9/0042 ,  G01L9/0055

    摘要： A semiconductor type differential pressure measurement apparatus is disclosed comprising a measuring diaphragm having its periphery fixed, and two measuring chambers, each having a predetermined spacing along both surfaces of the measuring diaphragm, and which detects differential pressure within allowable limits of measurement. When an overpressure is applied, the diaphragm is stopped by a wall of a measuring chamber to prevent the diaphragm from being damaged by overpressure, so that no additional mechanism is required to prevent damage from overpressure. One embodiment utilizes an additional chamber and overhang to reduce overpressure. Another embodiment utilizes a measuring chamber having the two sides of the diaphragm exposed to the ambient to eliminate need for a pressure resistant casing. In a further embodiment, injected impurities serve as a terminal.

    摘要翻译： 本发明公开了一种半导体型差压测量装置，其包括其周边固定的测量膜片和两个测量室，每个测量室沿着测量膜片的两个表面具有预定的间隔，并且在允许的测量限度内检测差压。 当施加过压时，隔膜被测量室的壁阻挡，以防止隔膜被过压损坏，因此不需要额外的机构来防止过压损坏。 一个实施例利用附加的腔室和突出部来降低过压。 另一个实施例使用具有暴露于环境的隔膜的两侧的测量室，以消除对耐压外壳的需要。 在另一个实施方案中，注入的杂质用作终端。

    Vibrating type pressure measuring device
    6.
    发明授权
    Vibrating type pressure measuring device 失效
    振动式压力测量装置

    公开(公告)号：US5123282A

    公开(公告)日：1992-06-23

    申请号：US694709

    申请日：1991-05-02

    申请人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Takahiro Kudo ,  Akio Fujita ,  Hideo Tsukamoto ,  Nobuaki Kohno ,  Hideaki Kuwayama

    发明人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Takahiro Kudo ,  Akio Fujita ,  Hideo Tsukamoto ,  Nobuaki Kohno ,  Hideaki Kuwayama

    IPC分类号： G01L9/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10

    CPC分类号： G01P15/097 ,  G01L9/0019 ,  G01P15/0802

    摘要： A vibrating type pressure measuring device having good shock wave proof measuring characteristics, high frequency response, good temperature characteristics, and can be readily miniaturized, wherein pressure to be measured is applied to a silicon diaphragm provided in an internal vacant space of a housing, and a magnetic field is applied by a DC current magnetic field applying device to a vibrator beam arranged in the inside of the diaphragm, with a gap therebetween kept in vacuum, and fixed to the diaphragm at both ends, and detects the changes in natural frequency of the vibrator beam caused by the pressure to be measured. The diaphragm and/or vibrator beam are constructed so one or the other or both have rough or uneven surfaces so as to prevent any adhesion therebetween.

    摘要翻译： 一种振动式压力测量装置，具有良好的抗震波测量特性，高频响应，良好的温度特性，并且可以容易地小型化，其中待测量的压力被施加到设置在壳体的内部空闲空间中的硅膜片，以及 通过直流电流磁场施加装置将磁场施加到布置在隔膜内部的振动子束，其间保持真空的间隙，并且固定在两端的隔膜上，并检测其自身频率的变化 由测量的压力引起的振动器光束。 隔膜和/或振动器梁被构造成一个或另一个或两者具有粗糙或不均匀的表面，以防止它们之间的任何粘附。

    Vibratory transducer
    7.
    发明授权
    Vibratory transducer 失效
    振动传感器

    公开(公告)号：US4841775A

    公开(公告)日：1989-06-27

    申请号：US145156

    申请日：1988-01-19

    申请人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Yasushi Higashino

    发明人： Kyoichi Ikeda ,  Tetsuya Watanabe ,  Yasushi Higashino

    IPC分类号： G01D5/243 ,  G01L1/10 ,  G01L1/16 ,  G01L1/18 ,  G01L9/00 ,  G01N9/00 ,  G01N35/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  H01L21/60 ,  H04R17/08

    CPC分类号： H01L21/76897 ,  G01D5/243 ,  G01L1/162 ,  G01L1/183 ,  G01L1/186 ,  G01L9/0019 ,  G01L9/002 ,  G01L9/0022 ,  G01L9/0023 ,  G01N9/002 ,  G01P15/0802 ,  G01P15/097 ,  G01N2035/00237 ,  H01L2924/3011 ,  H04R17/08

    摘要： A vibratory transducer comprising a vibratory beam composed of an n-type layer and having at least one end fixed. The vibratory beam is formed by selectively etching an n-type layer formed by adding impurities locally to a single silicon crystal. The vibratory transducer also comprises means for vibrating the vibratory beam and means for detecting vibration of the vibratory beam. The vibratory transducer measures pressure, temperature, density, etc, by detecting change in the resonant frequency of the vibratory beam. The vibratory beam can be finely etched irrespective of the density of the impurities therein by forming the vibratory beam in an alkaline aqueous solution while applying a negative DC or pulsed voltage to a p-type layer and a positive DC or pulsed voltage to an n-type layer. The vibrating and detecting means for the vibratory beam can be easily provided by making a diode and a transistor including the vibratory beam in the transducer.

    摘要翻译： 一种振动换能器，包括由n型层组成并且至少一端固定的振动梁。 通过选择性地蚀刻通过将杂质局部添加到单个硅晶体而形成的n型层来形成振动束。 振动换能器还包括用于振动振动梁的装置和用于检测振动梁的振动的装置。 振动传感器通过检测振动梁的共振频率的变化来测量压力，温度，密度等。 通过在碱性水溶液中形成振动束，同时向p型层施加负的DC或脉冲电压，并向正极直流或脉冲电压施加负的DC或脉冲电压，可以精细地蚀刻振动束，而不管其中的杂质的密度如何。 类型层。 用于振动束的振动和检测装置可以通过在换能器中制造包括振动束的二极管和晶体管来容易地提供。

    Wafer surface observing method and apparatus
    9.
    发明授权
    Wafer surface observing method and apparatus 有权
    晶圆表面观察方法及装置

    公开(公告)号：US08577119B2

    公开(公告)日：2013-11-05

    申请号：US11698987

    申请日：2007-01-29

    申请人： Hiroshi Higashi ,  Tetsuya Watanabe ,  Kenji Aiko

    发明人： Hiroshi Higashi ,  Tetsuya Watanabe ,  Kenji Aiko

    IPC分类号： G06K9/00 ,  G01N21/00

    CPC分类号： G01N21/9501 ,  G01N21/9503

    摘要： A wafer surface observing apparatus for inspecting a peripheral portion of an object has (A) a lens system and a CCD camera for taking images of the peripheral portion of the object, (B) storage for storing image data about the taken images, and (C) display for displaying the image data stored in the storage device. In particular, the present apparatus can have functions of rotating the object placed on a prealignment portion, recording images of one full outer periphery of an end portion of the object by the lens system and CCD camera into the location where the orientation flat portions or notched portions of the object are placed in position, accepting the images into the storage device, and displaying the images on a CRT.

    摘要翻译： 用于检查物体的周边部分的晶片表面观察装置具有（A）用于拍摄物体的周边部分的图像的透镜系统和CCD照相机，（B）用于存储关于拍摄图像的图像数据的存储器和（ C）显示用于显示存储在存储装置中的图像数据。 具体地说，本装置具有使放置在预对准部上的物体旋转的功能，通过透镜系统和CCD照相机将物体的端部的一个完整外周的图像记录到定位平面部分或切口的位置 将物体的部分放置在适当位置，将图像接收到存储装置中，并将图像显示在CRT上。