发明授权
- 专利标题: Semiconductor device having a plurality of conductive layers and manufacturing method therefor
- 专利标题(中): 具有多个导电层的半导体器件及其制造方法
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申请号: US267103申请日: 1988-11-07
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公开(公告)号: US4984055A公开(公告)日: 1991-01-08
- 发明人: Yoshinori Okumura , Atsuhiro Fujii , Masao Nagatomo , Hiroji Ozaki , Wataru Wakamiya , Takayuki Matsukawa
- 申请人: Yoshinori Okumura , Atsuhiro Fujii , Masao Nagatomo , Hiroji Ozaki , Wataru Wakamiya , Takayuki Matsukawa
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-298122 19871125
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L21/768 ; H01L21/8242 ; H01L23/485 ; H01L23/522 ; H01L27/10 ; H01L27/108
摘要:
A semiconductor device having a plurality of conductive layers is disclosed. The device has first level conductors (9) formed spaced apart on a semiconductor substrate (1). The semiconductor substrate (1) is provided with impurity diffusion regions (11) in its major surface between adjacent first level conductors (9). A triple layer insulation formed of a pair of oxide layers (12, 14) and an silicon oxide layer (13) sandwiched between the oxide layers (12, 14) covers the semiconductor substrate (1) and the first level conductors (9) thereon. At least one contact hole (15) is formed to extend through the triple layer insulation to either the impurity diffusion region (11) in the semiconductor substrate (1) or the first level conductor (9) on the semiconductor substrate (1). A second level conductor (16, 17) is provided on the triple layer insulation and on the inner surrounding wall of the contact hole (15). Each of the three insulating layers in the triple layer insulation has its hole-defining surface exposed at the contact hole (15) flush with or displaced laterally into the contact hole (15) away from a corresponding hole-defining exposed surface of the next overlying insulating layer.
公开/授权文献
- US6123122A Hygenic bottle cap and liquid dispensing system 公开/授权日:2000-09-26