发明授权
US5030434A Silicon nitride powders with improved surface properties and processes for their preparation 失效
具有改善表面性能的氮化硅粉末及其制备方法

Silicon nitride powders with improved surface properties and processes
for their preparation
摘要:
Si.sub.3 N.sub.4 powders having a total oxygen content of less than 1.8% by weight with the proportion of surface oxygen content of more than 65% of the total oxygen content, and having a fluorine content of less than 35 ppm are prepared by annealing Si.sub.3 N.sub.4 powders having a total oxygen content of less than or equal to 0.4% by weight in an oxygen-containing atmosphere at temperatures of 700.degree. C. to 1200.degree. C. for 15 to 90 minutes or by grinding Si.sub.3 N.sub.4 powders having a total oxygen content of less than or equal to 0.4% by weight in water, alcohol or aqueous alcohol 15 to 120 minutes.
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