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US5039657A Preparation of superconducting oxide films by reactive evaporation using ozone 失效
用臭氧反应蒸发制备超导氧化膜

Preparation of superconducting oxide films by reactive evaporation using
ozone
Abstract:
A low-temperature method is provided to prepare a superconductive ceramic oxide comprising contacting the surface of a heated substrate with ozone while evaporating the other components of the superconductive ceramic oxide onto said surface, so that a layer of the superconductive ceramic oxide forms thereon.
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