发明授权
US5043243A Positive-working quinone diazide photoresist composition containing a dye
失效
含有染料的正性醌醌二叠氮光致抗蚀剂组合物
- 专利标题: Positive-working quinone diazide photoresist composition containing a dye
- 专利标题(中): 含有染料的正性醌醌二叠氮光致抗蚀剂组合物
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申请号: US437929申请日: 1989-11-17
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公开(公告)号: US5043243A公开(公告)日: 1991-08-27
- 发明人: Mikio Yajima , Shigemitsu Kamiya , Shoji Kawata
- 申请人: Mikio Yajima , Shigemitsu Kamiya , Shoji Kawata
- 申请人地址: JPX Tokyo
- 专利权人: Nippon Zeon Co., Ltd.
- 当前专利权人: Nippon Zeon Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 主分类号: G03C1/72
- IPC分类号: G03C1/72 ; C08K5/18 ; C08K5/28 ; C08L61/04 ; C08L61/06 ; G03F7/004 ; G03F7/022 ; G03F7/023 ; G03F7/039 ; G03F7/09 ; H01L21/027
摘要:
A positive type photoresist composition comprising at least one alkali-soluble resin, at least one quinone diazide compound and a compound of the general formula (I) ##STR1## wherein R.sub.1 and R.sub.2 represents alkyl groups having 1 to 8 carbon atoms or a cycloalkyl group having 1 to 8 carbon atoms, R.sub.3 represents hydrogen, an alkyl group having 1 to 4 carbon atoms or halogen, R.sub.4 represents hydrogen or a cyano group and R.sub.5 represents a cyano group or a carboxyl group.
公开/授权文献
- US4461898A Process for the preparation of novel light stabilizers 公开/授权日:1984-07-24
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