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US5043243A Positive-working quinone diazide photoresist composition containing a dye 失效
含有染料的正性醌醌二叠氮光致抗蚀剂组合物

Positive-working quinone diazide photoresist composition containing a dye
摘要:
A positive type photoresist composition comprising at least one alkali-soluble resin, at least one quinone diazide compound and a compound of the general formula (I) ##STR1## wherein R.sub.1 and R.sub.2 represents alkyl groups having 1 to 8 carbon atoms or a cycloalkyl group having 1 to 8 carbon atoms, R.sub.3 represents hydrogen, an alkyl group having 1 to 4 carbon atoms or halogen, R.sub.4 represents hydrogen or a cyano group and R.sub.5 represents a cyano group or a carboxyl group.
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