发明授权
- 专利标题： Diffusion plasma-assisted chemical treatment apparatus
- 专利标题（中）： 扩散等离子体辅助化学处理装置
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申请号： US597812申请日： 1990-10-15
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公开(公告)号： US5105761A公开(公告)日： 1992-04-21
- 发明人: Barbara Charlet , Louise Peccoud , Thierry Sindzingre
- 申请人： Barbara Charlet , Louise Peccoud , Thierry Sindzingre
- 申请人地址： FRX Paris
- 专利权人： Commissariat a l'Energie Atomique
- 当前专利权人： Commissariat a l'Energie Atomique
- 当前专利权人地址： FRX Paris
- 优先权： FRX8913685 19891019
- 主分类号： H05H1/46
- IPC分类号： H05H1/46 ; C23C16/50 ; C23F4/00 ; H01J37/32 ; H01L21/205 ; H01L21/302 ; H01L21/31
摘要：
The apparatus comprises a tight treatment enclosure (10), means (20,22) for the axial production of a carrier gas plasma, a solid plate (30) serving as an obstacle to the plasma and located perpendicular to the enclosure axis and downstream of the plasma production means, plasma diffusion means (40) located downstream of the obstacle plate, several non-ionized vector gas supply tubes (50) issuing axially into the enclosure beneath the diffusion means and all located in the same plane around the enclosure axis, a substrate carrier (56) positioned downstream of the vector gas supply tubes and perpendicular to the axis and annular pumping means (66,16) for the gaseous medium contained in the enclosure and positioned downstream of the substrate carrier.
公开/授权文献
- US4006618A Method of producing seamless steel tube 公开/授权日：1977-02-08
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