发明授权
- 专利标题： Method of preparing an oxide superconducting thin film on a substrate with a plurality of grooves
- 专利标题（中）： 在具有多孔层的基材上制备氧化物超导薄膜的方法
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申请号： US677700申请日： 1991-03-29
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公开(公告)号： US5130296A公开(公告)日： 1992-07-14
- 发明人: Satoshi Takano , Shigeru Okuda , Noriyuki Yoshida , Noriki Hayashi , Kenichi Sato
- 申请人： Satoshi Takano , Shigeru Okuda , Noriyuki Yoshida , Noriki Hayashi , Kenichi Sato
- 申请人地址： JPX Osaka
- 专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人： Sumitomo Electric Industries, Ltd.
- 当前专利权人地址： JPX Osaka
- 优先权： JPX2-83192 19900329
- 主分类号： C01B13/14
- IPC分类号： C01B13/14 ; C01G1/00 ; C01G3/00 ; H01B12/00 ; H01B12/06 ; H01B13/00 ; H01L39/24
摘要：
When an oxide superconducting thin film is formed on a substrate by a vapor phase method such as laser ablation, for example, a plurality of grooves are formed on the substrate by photolithography or beam application in the same direction with an average groove-to-groove pitch of not more than 10 .mu.m, so that the oxide superconducting thin film is formed on a surface provided with such a plurality of grooves. Thus promoted is growth of crystals of the oxide superconducting thin film in parallel with the grooves, whereby respective directions of a-axes and c-axes are regulated to some extent. This improves critical current density of the oxide superconducting thin film.
公开/授权文献
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