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1.发明授权Method of preparing an oxide superconducting thin film on a substrate with a plurality of grooves 失效在具有多孔层的基材上制备氧化物超导薄膜的方法
公开(公告)号：US5130296A
公开(公告)日：1992-07-14
申请号：US677700
申请日：1991-03-29
CPC分类号： H01L39/2454 , Y10S505/732
摘要： When an oxide superconducting thin film is formed on a substrate by a vapor phase method such as laser ablation, for example, a plurality of grooves are formed on the substrate by photolithography or beam application in the same direction with an average groove-to-groove pitch of not more than 10 .mu.m, so that the oxide superconducting thin film is formed on a surface provided with such a plurality of grooves. Thus promoted is growth of crystals of the oxide superconducting thin film in parallel with the grooves, whereby respective directions of a-axes and c-axes are regulated to some extent. This improves critical current density of the oxide superconducting thin film.
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公开(公告)号：US5334252A
公开(公告)日：1994-08-02
申请号：US952928
申请日：1992-09-25
申请人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
发明人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
IPC分类号： C01B13/14 , C01G1/00 , C01G3/00 , C23C14/00 , C23C14/08 , C23C14/28 , C23C14/34 , C30B23/08 , C30B29/22 , H01B12/06 , H01B13/00 , H01L39/24
CPC分类号： C23C14/087 , C23C14/0021 , C23C14/28 , H01L39/2448 , Y10S505/73 , Y10S505/732 , Y10S505/786
摘要： In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plasma 6, which is generated by the application of the laser beam 2.
摘要翻译： 为了即使在成膜速度高的情况下，也能够在精细结构中形成平滑且致密的氧化物超导膜，而且在精细结构中不会形成明显的晶界，因此采用激光烧蚀方法将激光束2施加于含有成分 的氧化物超导材料和从靶1散射的沉积颗粒在基板3上，同时从气态氧气入口7向激光等离子体6供应气态氧，激光等离子体6是通过施加激光束2 。
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公开(公告)号：US5187148A
公开(公告)日：1993-02-16
申请号：US662874
申请日：1991-03-01
申请人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
发明人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
IPC分类号： C01B13/14 , C01G1/00 , C01G3/00 , C23C14/00 , C23C14/08 , C23C14/28 , C23C14/34 , C30B23/08 , C30B29/22 , H01B12/06 , H01B13/00 , H01L39/24
CPC分类号： C23C14/087 , C23C14/0021 , C23C14/28 , H01L39/2448 , Y10S505/73 , Y10S505/732 , Y10S505/786
摘要： In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plasma 6, which is generated by the application of the laser beam 2.
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4.发明授权
公开(公告)号：US5360785A
公开(公告)日：1994-11-01
申请号：US59428
申请日：1993-05-07
申请人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
发明人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
CPC分类号： H01L39/2448 , C23C14/087 , C23C14/28 , Y10S505/73 , Y10S505/732
摘要： In a method of preparing an oxide superconducting thin film having a composition of Y-Ba-Cu-O, for example, using laser ablation, which comprises the steps of applying a laser beam to a target containing components of an oxide superconductive material and depositing particles, being thereby scattered from the target, on a substrate, the oxygen gas flow rate during film deposition is set to be at least 50 SCCM, the oxygen gas pressure during film deposition is set to be 10 to 1000 mTorr, the distance between a target 9 and a substrate 10 is set to be 40 to 100 mm, the temperature of the substrate 10 is set to be 600.degree. to 800.degree. C., the energy density of a laser beam 7 on the surface of the target 9 is set to be at least 1 J/cm.sup.2, and the laser pulse energy is set to be at least 10 mJ.
摘要翻译： 在制备具有例如使用激光烧蚀的Y-Ba-Cu-O组成的氧化物超导薄膜的方法中，包括以下步骤：将激光束施加到包含氧化物超导材料的组分的靶上，并沉积 颗粒从靶上散布在基板上，成膜期间的氧气流量设定为至少50SCCM，成膜期间的氧气压力设定为10〜1000mTorr，a 靶材9和基板10被设定为40〜100mm，将基板10的温度设定为600〜800℃，设定目标9的表面上的激光束7的能量密度 为至少1J / cm 2，激光脉冲能量设定为至少10mJ。
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公开(公告)号：US5300485A
公开(公告)日：1994-04-05
申请号：US951967
申请日：1992-09-25
申请人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
发明人： Noriyuki Yoshida , Satoshi Takano , Shigeru Okuda , Noriki Hayashi , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
IPC分类号： C01B13/14 , C01G1/00 , C01G3/00 , C23C14/00 , C23C14/08 , C23C14/28 , C23C14/34 , C30B23/08 , C30B29/22 , H01B12/06 , H01B13/00 , H01L39/24 , B05D3/06 , B05D5/12
CPC分类号： C23C14/087 , C23C14/0021 , C23C14/28 , H01L39/2448 , Y10S505/73 , Y10S505/732 , Y10S505/786
摘要： In order to enable formation of a smooth and dense oxide superconducting film with no clear appearance of grain boundaries in a fine structure even at a high film forming rate, a laser ablation method is employed to apply a laser beam 2 to a target 1 containing components of an oxide superconductive material and deposit particles, which are thus scattered from the target 1, on a substrate 3, while gaseous oxygen is supplied from a gaseous oxygen inlet 7 toward laser plume 6, which is generated by the application of the laser beam 2, and to a portion of the target irradiated with said laser.
摘要翻译： 为了即使在成膜速度高的情况下，也能够在精细结构中形成平滑且致密的氧化物超导膜，而且在精细结构中不会形成明显的晶界，因此采用激光烧蚀方法将激光束2施加于含有成分 的氧化物超导材料和从靶1散射的沉积颗粒在基板3上，同时气态氧气从气态氧气入口7供应到通过施加激光束2产生的激光羽流6 ，并且与用该激光照射的目标的一部分。
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6.发明授权Oxide superconductive wire, method of manufacturing the same and the products using the same 失效氧化物超导线，其制造方法和使用其的产品
公开(公告)号：US5372991A
公开(公告)日：1994-12-13
申请号：US196615
申请日：1994-02-15
CPC分类号： H01F6/06 , H01B12/06 , H01L39/248 , Y02E40/642 , Y10S505/70 , Y10S505/704 , Y10S505/705
摘要： An oxide superconductive wire is provided by, for example, forming an oxide superconductive layer on a tape-type flexible base. A preliminary compressive strain is applied to the oxide superconductive layer in the longitudinal direction. The remaining strain can be provided by using a base having thermal expansion coefficient larger than that of the oxide superconductive layer and by cooling the same after heat treatment, due to contraction of the base. Since the preliminary compressive strain is applied to the oxide superconductive layer, degradation of superconductivity of the oxide superconductive layer can be suppressed even if the oxide superconductive wire is bent in any direction, compared with the wire without such strain. Therefore, the oxide superconductive wire can be coiled, for example, without much degrading the superconductivity.
摘要翻译： 氧化物超导线通过例如在带状柔性基底上形成氧化物超导层而提供。 在纵向上对氧化物超导层施加预压缩应变。 可以通过使用具有大于氧化物超导层的热膨胀系数的碱的基底，并且由于基底的收缩而在热处理后对其进行冷却来提供剩余的应变。 由于将预压缩应变施加到氧化物超导层上，与没有这种应变的线相比，即使氧化物超导线在任何方向上弯曲，也可以抑制氧化物超导层的超导性的劣化。 因此，氧化物超导线例如可以卷绕，而不会使超导性降低。
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7.发明授权Oxide superconductive wire, method of manufacturing the same and the products using the same 失效氧化物超导线，其制造方法和使用其的产品
公开(公告)号：US5312802A
公开(公告)日：1994-05-17
申请号：US613868
申请日：1990-11-29
CPC分类号： H01F6/06 , H01B12/06 , H01L39/248 , Y02E40/642 , Y10S505/70 , Y10S505/704 , Y10S505/705
摘要： An oxide superconductive wire is provided by, for example, forming an oxide superconductive layer on a tape-type flexible base. A preliminary compressive strain is applied to the oxide superconductive layer in the longitudinal direction. The remaining strain can be provided by using a base having thermal expansion coefficient larger than that of the oxide superconductive layer and by cooling the same after heat treatment, due to contraction of the base. Since the preliminary compressive strain is applied to the oxide superconductive layer, degradation of superconductivity of the oxide superconductive layer can be suppressed even if the oxide superconductive wire is bent in any direction, compared with the wire without such strain. Therefore, the oxide superconductive wire can be coiled, for example, without much degrading the superconductivity.
摘要翻译： PCT No.PCT / JP90 / 00422 Sec。 371日期1990年11月29日第 102（e）1990年11月29日PCT PCT 1990年3月29日PCT公布。 WO90 / 12408 PCT出版物 日期1990年10月18日。氧化物超导线例如通过在带状柔性基底上形成氧化物超导层而提供。 在纵向上对氧化物超导层施加预压缩应变。 可以通过使用具有大于氧化物超导层的热膨胀系数的碱的基底，并且由于基底的收缩而在热处理后对其进行冷却来提供剩余的应变。 由于将预压缩应变施加到氧化物超导层上，与没有这种应变的线相比，即使氧化物超导线在任何方向上弯曲，也可以抑制氧化物超导层的超导性的劣化。 因此，氧化物超导线例如可以卷绕，而不会使超导性降低。
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公开(公告)号：US5607899A
公开(公告)日：1997-03-04
申请号：US393747
申请日：1995-02-24
申请人： Noriyuki Yoshida , Kousou Fujino , Noriki Hayashi , Shigeru Okuda , Tsukushi Hara , Hideo Ishii
发明人： Noriyuki Yoshida , Kousou Fujino , Noriki Hayashi , Shigeru Okuda , Tsukushi Hara , Hideo Ishii
IPC分类号： C01G1/00 , C01G3/00 , C30B23/00 , C30B23/02 , C30B29/22 , H01B12/06 , H01B13/00 , H01L21/203 , H01L39/24 , C30B23/08 , C30B25/06
CPC分类号： H01L39/2448 , C30B23/02 , C30B29/16 , C30B29/22 , C30B29/225 , H01L39/2461 , Y10S505/732
摘要： A thin film strongly orienting specific crystal axes is deposited on a polycrystalline or amorphous base material in accordance with laser deposition in a simpler device through a simpler process. A target is irradiated with a laser beam, for forming a thin film in accordance with laser ablation of depositing a substance scattered from the target on a base material. In order to form the thin film, prepared are conditions capable of forming a film orienting a specific crystal axis substantially perpendicularly to the base material in substantially parallel arrangement of the target and the base material. Under the conditions, a film is deposited on the base material which is inclined at a prescribed angle .theta. with respect to the target. It is possible to deposit a film strongly orienting a specific crystal axis in a plane substantially parallel to the base material surface by inclining the base material under the specific film forming conditions.
摘要翻译： 通过更简单的工艺，在更简单的装置中，根据激光沉积，将特定晶轴强烈取向的薄膜沉积在多晶或非晶基材上。 用激光照射目标物，用于根据在基材上沉积从靶上散出的物质的激光烧蚀来形成薄膜。 为了形成薄膜，制备能够基本上平行排列靶材和基材的方式形成基本上垂直于基材垂直的特定晶轴的膜的条件。 在这种条件下，在相对于目标物以规定角度θ倾斜的基材上沉积膜。 通过在特定的成膜条件下使基材倾斜，可以将基本平行于基材表面的平面中的特定晶轴强制取向。
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公开(公告)号：US5372089A
公开(公告)日：1994-12-13
申请号：US97788
申请日：1993-07-26
申请人： Noriyuki Yoshida , Satoshi Takano , Kousou Fujino , Shigeru Okuda , Tsukushi Hara , Hideo Ishii
发明人： Noriyuki Yoshida , Satoshi Takano , Kousou Fujino , Shigeru Okuda , Tsukushi Hara , Hideo Ishii
CPC分类号： H01L39/2448 , C30B23/02 , C30B25/18 , C30B29/22 , C30B29/225 , H01L39/2422 , H01L39/2461 , Y10S505/729 , Y10S505/73 , Y10S505/732
摘要： Disclosed herein is a method of forming a single-crystalline thin film having excellent crystallinity on a base material without depending on the material for and crystallinity of the base material. In this method, a base material is provided thereon with a mask which can prevent chemical species contained in a vapor phase from adhering to the base material. The base material is continuously moved along arrow A, to deliver a portion covered with the mask into the vapor phase for crystal growth. Thus, a thin film is successively deposited on the portion of the base material, which is delivered from under the mask, from the vapor phase. A crystal growth end is formed on a boundary region between a portion of the base material which is covered with the mask and that which is exposed to the vapor phase, so that a crystal having the same orientation as the growth end is grown on a portion of the base material newly exposed by the movement.
摘要翻译： 本文公开了在基材上形成具有优异结晶性的单晶薄膜的方法，而不依赖于基材的材料和结晶性。 在该方法中，在其上设置有能够防止气相中所含的化学物质附着在基材上的掩模的基材。 基材沿箭头A连续移动，以将覆盖有掩模的部分输送到气相中以进行晶体生长。 因此，薄膜依次沉积在从掩模下面从气相输送的基材的部分上。 晶体生长端形成在被掩模覆盖的基材的部分和暴露于气相的部分之间的边界区域上，使得具有与生长端相同取向的晶体生长在部分上 的运动新露出的基础材料。
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公开(公告)号：US5212151A
公开(公告)日：1993-05-18
申请号：US623477
申请日：1990-12-07
申请人： Satoshi Takano , Shigeru Okuda , Noriyuki Yoshida , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
发明人： Satoshi Takano , Shigeru Okuda , Noriyuki Yoshida , Tsukushi Hara , Kiyoshi Okaniwa , Takahiko Yamamoto
CPC分类号： C23C14/087 , C23C14/28 , H01L39/2448 , Y10S428/93 , Y10S505/701 , Y10S505/732
摘要： An oxide superconducting thin film formed by laser ablation comprises a matrix formed of c-axis oriented superconducting phases and foreign phases which are different in crystal orientation from the matrix. In order to improve critical current density of the oxide superconducting thin film, preferably selected are such conditions that the size of each superconducting phase in its a-b plane is not more than 0.1 .mu.m in diameter, the size of each superconducting phase along its c-axis direction is equal to the thickness of the oxide superconducting thin film, the foreign phases at least partially pass through the oxide superconducting thin film along the direction of thickness, the size of each foreign phase is at least 0.01 .mu.m and not more than 5 .mu.m in diameter, each foreign phase has an a-axis or a c-axis perpendicularly oriented with respect to the major surface of the oxide superconducting thin film, and the like.
摘要翻译： 通过激光烧蚀形成的氧化物超导薄膜包括由c轴取向的超导相和与基体的晶体取向不同的异相形成的基体。 为了提高氧化物超导薄膜的临界电流密度，优选选择这样的条件，即其ab面中的每个超导相的尺寸的直径不大于0.1μm，每个超导相沿其c- 轴向等于氧化物超导薄膜的厚度，异相至少部分地沿着厚度方向通过氧化物超导薄膜，每个异相的尺寸为至少0.01μm且不大于5 每个异相具有相对于氧化物超导薄膜的主表面垂直取向的a轴或c轴等。
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