发明授权
US5143860A High density EPROM fabricaiton method having sidewall floating gates
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具有侧壁浮动栅极的高密度EPROM构造方法
- 专利标题: High density EPROM fabricaiton method having sidewall floating gates
- 专利标题(中): 具有侧壁浮动栅极的高密度EPROM构造方法
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申请号: US686734申请日: 1991-04-17
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公开(公告)号: US5143860A公开(公告)日: 1992-09-01
- 发明人: Allan T. Mitchell , Bert R. Riemenschneider , Howard L. Tigilaar
- 申请人: Allan T. Mitchell , Bert R. Riemenschneider , Howard L. Tigilaar
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: TX Dallas
- 主分类号: G11C11/56
- IPC分类号: G11C11/56 ; G11C16/04 ; H01L21/28 ; H01L21/8247 ; H01L27/115 ; H01L29/423 ; H01L29/788
摘要:
An EPROM memory having sidewall floating gates (30) is disclosed. Sidewall floating gates (30) are formed on sidewalls (28) of field insulators (24). Spaced apart bit lines (22), which serve as memory cell sources and drains, are formed. The field insulators (24) overlie the bit lines (22), and sidewall floating gates are formed on the sidewalls (28) of the field insulators (24). In one embodiment, a second set of bit lines (36) is formed between the sidewall floating gates (30), and each memory cell contains one sidewall floating gate (30). In another embodiment, each memory cell contains two sidewall floating gate (30), and the memory cell may be programmed to store from two to four distinct information states.
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