Invention Grant
US5181874A Method of making microelectronic field emission device with air bridge
anode
失效
制造具有空气桥阳极的微电子场发射装置的方法
- Patent Title: Method of making microelectronic field emission device with air bridge anode
- Patent Title (中): 制造具有空气桥阳极的微电子场发射装置的方法
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Application No.: US865384Application Date: 1992-04-08
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Publication No.: US5181874APublication Date: 1993-01-26
- Inventor: Marko Sokolich , Zaher Bardai
- Applicant: Marko Sokolich , Zaher Bardai
- Applicant Address: CA Los Angeles
- Assignee: Hughes Aircraft Company
- Current Assignee: Hughes Aircraft Company
- Current Assignee Address: CA Los Angeles
- Main IPC: H01J3/02
- IPC: H01J3/02 ; H01J9/02 ; H01J21/10
Abstract:
A field emission device employs an anode in the form of an air bridge spanning the tip of a field emission cathode. The anode is supported only at its opposite ends, leaving the area under the air bridge open. An array of cathode emitters employ a series of parallel, laterally spaced anode air bridges, with each air bridge spanning a line of cathodes. The lateral spacing between the air bridges facilitates both the removal of underlying photo-resist during fabrication, and the establishment of a uniform vacuum if desired. The clearance between the anode and cathode is substantially less than previously obtainable, resulting in a significant reduction in both size and in the anode's operating voltage level. Fabrication of the air bridge anodes can be integrtaed with the remainder of an integrated circuit.
Public/Granted literature
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