发明授权
- 专利标题： Method of emitting electrons
- 专利标题（中）： 发射电子的方法
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申请号： US848727申请日： 1992-03-09
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公开(公告)号： US5201681A公开(公告)日： 1993-04-13
- 发明人: Masahiko Okunuki , Akira Suzuki , Isamu Shimoda , Tetsuya Kaneko , Takeo Tsukamoto , Toshihiko Takeda , Takao Yonehara , Takeshi Ichikawa
- 申请人： Masahiko Okunuki , Akira Suzuki , Isamu Shimoda , Tetsuya Kaneko , Takeo Tsukamoto , Toshihiko Takeda , Takao Yonehara , Takeshi Ichikawa
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX62-024872 19870206; JPX62-024873 19870206; JPX62-038075 19870223; JPX62-038076 19870223; JPX62-047816 19870304; JPX62-050344 19870306; JPX62-052113 19870309; JPX62-067892 19870324; JPX62-070467 19870326; JPX62-073601 19870327
- 主分类号： H01J1/304
- IPC分类号： H01J1/304 ; H01J3/02 ; H01J9/02 ; H01J31/12
摘要：
A method of emitting electrons by applying a voltage between a voltage application electrode and a target to be irradiated with the electrons emitted from an electron emission electrode with a conical portion in an electron emission device. The voltage application electrode is formed to oppose the electron emission electrode so as to sandwich an insulating layer therebetween and the target. A charge of the electron emission electrode which is lost by electron emission during an electron emission operation is supplied after the electron emission operation is completed.
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