公开(公告)号：US5201681A

公开(公告)日：1993-04-13

申请号：US848727

申请日：1992-03-09

申请人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

发明人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

IPC分类号： H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J31/12

CPC分类号： H01J9/025 ,  H01J1/3042 ,  H01J3/022 ,  H01J31/127 ,  H01J2201/30446

摘要： A method of emitting electrons by applying a voltage between a voltage application electrode and a target to be irradiated with the electrons emitted from an electron emission electrode with a conical portion in an electron emission device. The voltage application electrode is formed to oppose the electron emission electrode so as to sandwich an insulating layer therebetween and the target. A charge of the electron emission electrode which is lost by electron emission during an electron emission operation is supplied after the electron emission operation is completed.

摘要翻译： 通过在电子发射装置中通过在电压施加电极和被电子发射电子发射的电子与电子发射电极发射的锥形部分之间施加电压来照射电子的方法。 电压施加电极形成为与电子发射电极相对以在其间夹有绝缘层和靶。 在电子发射操作完成之后，供给在电子发射操作期间被电子发射损失的电子发射电极的电荷。

公开(公告)号：US5361015A

公开(公告)日：1994-11-01

申请号：US011006

申请日：1993-01-29

申请人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

发明人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

IPC分类号： H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J31/12 ,  H01J7/06 ,  H01L21/02

CPC分类号： H01J9/025 ,  H01J1/3042 ,  H01J3/022 ,  H01J31/127 ,  H01J2201/30446

摘要： A multi type electron emission element comprises a plurality of electrodes formed on a deposition surface of an insulating material and each having a conical portion of a single crystal, an insulating layer formed on the deposition surface and having openings respectively centered on the conical portions, and a deriving electrodes, part of which is formed near at least the conical portions, the deriving electrode being formed on the insulating layer.

摘要翻译： 多型电子发射元件包括形成在绝缘材料的沉积表面上并且各自具有单晶的锥形部分的多个电极，形成在沉积表面上并具有分别以锥形部分为中心的开口的绝缘层，以及 导电电极，其一部分形成在至少锥形部分附近，导电电极形成在绝缘层上。

公开(公告)号：US5176557A

公开(公告)日：1993-01-05

申请号：US746154

申请日：1991-08-14

申请人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

发明人： Masahiko Okunuki ,  Akira Suzuki ,  Isamu Shimoda ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Takao Yonehara ,  Takeshi Ichikawa

IPC分类号： H01J1/304 ,  H01J3/02 ,  H01J9/02 ,  H01J31/12

CPC分类号： H01J3/022 ,  H01J1/3042 ,  H01J31/127 ,  H01J9/025 ,  H01J2201/30446

摘要： A multi type electron emission element comprises a plurality of electrodes formed on a deposition surface of an insulating material and each having a conical portion of a single crystal, an insulating layer formed on the deposition surface and having openings respectively centered on the conical portions, and a deriving electrodes, part of which is formed near at least the concial portions, the deriving electrode being formed on the insulating layer.

摘要翻译： 多型电子发射元件包括形成在绝缘材料的沉积表面上并且各自具有单晶的锥形部分的多个电极，形成在沉积表面上并具有分别以锥形部分为中心的开口的绝缘层，以及 导电电极，其一部分形成在至少相邻的部分附近，导电电极形成在绝缘层上。

公开(公告)号：US4974736A

公开(公告)日：1990-12-04

申请号：US469730

申请日：1990-01-24

申请人： Masahiko Okunuki ,  Mitsuaki Seki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda

发明人： Masahiko Okunuki ,  Mitsuaki Seki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda

IPC分类号： H01J37/073 ,  H01J37/317

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/073 ,  H01J37/3177

摘要： A multi-electron-beam pattern drawing apparatus having a plurality of electron beam sources and a plurality of electron beam sensors, provided on a common base member, is disclosed. The electron beam sources can be selectively driven for different uses, such as a pattern drawing (exposure) purpose and position detecting purpose, for example. In another aspect, the apparatus is provided with a function for correcting the pattern drawing magnification.

公开(公告)号：US4897552A

公开(公告)日：1990-01-30

申请号：US186967

申请日：1988-04-27

申请人： Masahiko Okunuki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda ,  Mitsuaki Seki

发明人： Masahiko Okunuki ,  Isamu Shimoda ,  Mamoru Miyawaki ,  Takeo Tsukamoto ,  Akira Suzuki ,  Tetsuya Kaneko ,  Toshihiko Takeda ,  Mitsuaki Seki

IPC分类号： H01J37/30 ,  H01J37/317

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J37/3177

摘要： A charged-particle beam pattern drawing apparatus for drawing, by use of a charged-particle beam, a desired circuit pattern on a workpiece having a surface coated with a sensitive material, is disclosed. The apparatus includes a data source having data stored therein related to the circuit pattern, a plurality of charged-particle beam producing sources for emitting charged-particle beams toward the workpiece, in accordance with the data supplied thereto from the data source, and a plurality of deflecting electrodes each being provided for a corresponding one of the charged-particle beam producing source, for deflecting the charged-particle beams from the charged-particle beam producing sources independently of each other and in accordance with the data supplied from the data source.

公开(公告)号：US4904895A

公开(公告)日：1990-02-27

申请号：US189216

申请日：1988-05-02

申请人： Takeo Tsukamoto ,  Mamoru Miyawaki ,  Tetsuya Kaneko ,  Akira Suzuki ,  Isamu Shimoda ,  Toshihiko Takeda ,  Masahiko Okunuki

发明人： Takeo Tsukamoto ,  Mamoru Miyawaki ,  Tetsuya Kaneko ,  Akira Suzuki ,  Isamu Shimoda ,  Toshihiko Takeda ,  Masahiko Okunuki

IPC分类号： H01J1/304 ,  H01J3/02

CPC分类号： B82Y10/00 ,  H01J1/3042 ,  H01J3/022

摘要： An electron emission device comprises an electron emission electrode with a pointed end and a counter electrode positioned opposite to the pointed end, both formed by fine working of a conductive layer laminated on an insulating substrate.

公开(公告)号：US06515640B2

公开(公告)日：2003-02-04

申请号：US09060354

申请日：1998-04-15

申请人： Takeo Tsukamoto ,  Mamoru Miyawaki ,  Tetsuya Kaneko ,  Akira Suzuki ,  Isamu Shimoda ,  Toshihiko Takeda ,  Masahiko Okunuki

发明人： Takeo Tsukamoto ,  Mamoru Miyawaki ,  Tetsuya Kaneko ,  Akira Suzuki ,  Isamu Shimoda ,  Toshihiko Takeda ,  Masahiko Okunuki

IPC分类号： G09G320

CPC分类号： B82Y10/00 ,  H01J1/3042 ,  H01J3/022

摘要： An electron emission device comprises an electron emission electrode with a pointed end and a counter electrode positioned opposite to the pointed end, both formed by fine working of a conductive layer laminated on an insulating substrate.

摘要翻译： 电子发射装置包括具有尖端的电子发射电极和与尖端相对定位的对电极，两者都是通过层压在绝缘衬底上的导电层的精细加工形成的。

公开(公告)号：US5786658A

公开(公告)日：1998-07-28

申请号：US199967

申请日：1994-02-22

申请人： Takeo Tsukamoto ,  Mamoru Miyawaki ,  Tetsuya Kaneko ,  Akira Suzuki ,  Isamu Shimoda ,  Toshihiko Takeda ,  Masahiko Okunuki

发明人： Takeo Tsukamoto ,  Mamoru Miyawaki ,  Tetsuya Kaneko ,  Akira Suzuki ,  Isamu Shimoda ,  Toshihiko Takeda ,  Masahiko Okunuki

IPC分类号： H01J1/304 ,  H01J3/02 ,  H01J1/02

CPC分类号： B82Y10/00 ,  H01J1/3042 ,  H01J3/022

摘要： An electron emission device comprises an electron emission electrode with a pointed end and a counter electrode positioned opposite to the pointed end, both formed by fine working of a conductive layer laminated on an insulating substrate.

公开(公告)号：US4894611A

公开(公告)日：1990-01-16

申请号：US186963

申请日：1988-04-27

申请人： Isamu Shimoda ,  Mamoru Miyawaki ,  Akira Suzuki ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Masahiko Okunuki

发明人： Isamu Shimoda ,  Mamoru Miyawaki ,  Akira Suzuki ,  Tetsuya Kaneko ,  Takeo Tsukamoto ,  Toshihiko Takeda ,  Masahiko Okunuki

IPC分类号： G01R31/26 ,  G01R31/24 ,  H01J9/42 ,  H01J37/06

CPC分类号： G01R31/24

摘要： A measuring system particularly suitably usable with an apparatus having a plurality of electron emitting sources, for measuring the characteristics of the electron emitting sources is disclosed. In the measuring system, the electron emitting sources are driven so that they emit electron flows of predetermined and different frequencies. The emitted electron flows are collected and, thereafter, only those signals having components corresponding to the predetermined frequencies are extracted. Based on the extracted signals, the characteristics of the electron emitting sources are measured at the same time and independently of each other.

摘要翻译： 公开了一种特别适用于具有多个电子发射源的装置的测量系统，用于测量电子发射源的特性。 在测量系统中，电子发射源被驱动，使得它们发射预定和不同频率的电子流。 收集发射的电子流，然后仅提取具有与预定频率对应的分量的那些信号。 基于所提取的信号，电子发射源的特性同时并且彼此独立地被测量。

公开(公告)号：US5185559A

公开(公告)日：1993-02-09

申请号：US593561

申请日：1990-10-09

申请人： Isamu Shimoda ,  Takeo Tsukamoto ,  Akira Shimizu ,  Akira Suzuki ,  Masao Sugata ,  Masahiko Okunuki

发明人： Isamu Shimoda ,  Takeo Tsukamoto ,  Akira Shimizu ,  Akira Suzuki ,  Masao Sugata ,  Masahiko Okunuki

IPC分类号： H01J1/13

CPC分类号： H01J1/135

摘要： An electron emission device is provided in which a drive current for driving an electron emission element is maintained at a constant level. The device comprises a transistor having its base provided with a divided voltage. The electron emission element is responsive to the transistor.

摘要翻译： 提供一种电子发射器件，其中用于驱动电子发射元件的驱动电流保持在恒定水平。 该器件包括其基极设置有分压的晶体管。 电子发射元件响应晶体管。