发明授权
- 专利标题: Method for fabricating a semiconductor memory cell
- 专利标题(中): 用于制造半导体存储单元的方法
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申请号: US849916申请日: 1992-03-12
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公开(公告)号: US5219780A公开(公告)日: 1993-06-15
- 发明人: Young K. Jun
- 申请人: Young K. Jun
- 申请人地址: KRX
- 专利权人: Gold Star Electron Co., Ltd.
- 当前专利权人: Gold Star Electron Co., Ltd.
- 当前专利权人地址: KRX
- 优先权: KRX4050/1991 19910314; KRX5961/1991 19910413
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; H01L21/822 ; H01L21/8242 ; H01L27/10 ; H01L27/108
摘要:
The present invention relates to a method for fabricating a semiconductor memory cell consisting of a switching transistor and a capacitor wherein a polysilicon pad and a polysilicon storage node are simultaneously patterned with a self-alignment method without a mask.Accordingly, the present invention has the following advantages: First, the overlay accuracy can be improved by patterning a polysilicon pad and a polysilicon storage node with a self-alignment method. Second, the fabrication process can be simpler than the prior fabrication process for the semiconductor memory cell of a noble stacked capacitor cell structure. Third, the storage capacitance of a capacitor can be increased.
公开/授权文献
- US6155338A Heat exchanger 公开/授权日:2000-12-05
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