发明授权
US5236895A Production of oxide superconducting films by laser sputtering using N.sub.2
.sub.2
失效
使用N2O或NO2通过激光溅射生产氧化物超导膜
- 专利标题： Production of oxide superconducting films by laser sputtering using N.sub.2 .sub.2
- 专利标题（中）： 使用N2O或NO2通过激光溅射生产氧化物超导膜
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申请号： US735175申请日： 1991-07-23
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公开(公告)号： US5236895A公开(公告)日： 1993-08-17
- 发明人: Yukio Nishiyama , Shichio Kawai , Tomoji Kawai , Hitoshi Tabata , Osamu Murata , Junzo Fujioka
- 申请人： Yukio Nishiyama , Shichio Kawai , Tomoji Kawai , Hitoshi Tabata , Osamu Murata , Junzo Fujioka
- 申请人地址： JPX Hyogo
- 专利权人： Kawasaki Jukogyo Kabushiki Kaisha
- 当前专利权人： Kawasaki Jukogyo Kabushiki Kaisha
- 当前专利权人地址： JPX Hyogo
- 优先权： JPX63-297007 19881124
- 主分类号： C23C14/00
- IPC分类号： C23C14/00 ; C23C14/08 ; H01L39/24
摘要：
There is provided in a process for depositing a metal oxide superconducting film on a substrate by laser sputtering, the improvement which comprises carrying out the deposition of the metal oxide superconducting film in the presence of a gas having higher oxidation potential than oxygen.