发明授权
- 专利标题: Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same
- 专利标题(中): 半导体集成电路及其制造方法及其制造装置
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申请号: US881314申请日: 1992-05-07
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公开(公告)号: US5264712A公开(公告)日: 1993-11-23
- 发明人: Jun Murata , Yoshitaka Tadaki , Hiroko Kaneko , Toshihiro Sekiguchi , Hiroyuki Uchiyama , Hisashi Nakamura , Toshio Maeda , Osamu Kasahara , Hiromichi Enami , Atsushi Ogishima , Masaki Nagao , Michimasa Funabashi , Yasuo Kiguchi , Masayuki Kojima , Atsuyoshi Koike , Hiroyuki Miyazawa , Masato Sadaoka , Kazuya Kadota , Tadashi Chikahara , Kazuo Nojiri , Yutaka Kobayashi
- 申请人: Jun Murata , Yoshitaka Tadaki , Hiroko Kaneko , Toshihiro Sekiguchi , Hiroyuki Uchiyama , Hisashi Nakamura , Toshio Maeda , Osamu Kasahara , Hiromichi Enami , Atsushi Ogishima , Masaki Nagao , Michimasa Funabashi , Yasuo Kiguchi , Masayuki Kojima , Atsuyoshi Koike , Hiroyuki Miyazawa , Masato Sadaoka , Kazuya Kadota , Tadashi Chikahara , Kazuo Nojiri , Yutaka Kobayashi
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-65848 19890320; JPX1-69069 19890320
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234 ; H01L27/105 ; H01L21/308 ; H01L29/66
摘要:
A semiconductor integrated circuit comprising first n-channel MISFETs constituting the memory cells of a storage system, second n-channel MISFETs constituting the peripheral circuits of the storage system, and third n-channel MISFETs constituting the output circuit among the peripheral circuits. The respective threshold voltages of the first n-channel MISFETs, the second n-channel MISFETs and the third n-channel MISFETs are decreased in that order when the respective gate lengths of those MISFETs are substantially the same.
公开/授权文献
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