发明授权
- 专利标题: Method of probing test
- 专利标题(中): 探测方法
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申请号: US693536申请日: 1991-04-30
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公开(公告)号: US5274575A公开(公告)日: 1993-12-28
- 发明人: Yuuichi Abe
- 申请人: Yuuichi Abe
- 申请人地址: JPX Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-123396 19900514
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; G01R31/28 ; H01L21/66 ; G06F15/46
摘要:
A method of the probing test comprising the steps of detecting a first scribe line of chips in a wafer, calculating a first center line of said first scribe line on the basis of the resultant, detecting a second scribe line intersecting the first scribe line, calculating a second center line of said second scribe line on the basis of the resultant, calculating a crossing point of the first and second center lines, identifying a reference pad of a first chip at predetermined position by referring to the crossing point, positioning a reference probe, which has a predetermined positional relationship with the crossing point, at the reference pad on the first chip, moving the test object. Therefore, each of the pads is respectively contacted with each of the probes.
公开/授权文献
- US5684939A Antialiased imaging with improved pixel supersampling 公开/授权日:1997-11-04
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