Invention Grant
US5280983A Semiconductor processing system with robotic autoloader and load lock
失效
带有机器人自动装载机和加载锁的半导体处理系统
- Patent Title: Semiconductor processing system with robotic autoloader and load lock
- Patent Title (中): 带有机器人自动装载机和加载锁的半导体处理系统
-
Application No.: US963006Application Date: 1992-10-19
-
Publication No.: US5280983APublication Date: 1994-01-25
- Inventor: Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
- Applicant: Dan Maydan , Sasson R. Somekh , Charles Ryan-Harris , Richard A. Seilheimer , David Cheng , Edward M. Abolnikov , Lance S. Reinke , J. Christopher Moran , Richard M. Catlin, Jr. , Robert B. Lowrance , Gregory W. Ridgeway
- Applicant Address: CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: CA Santa Clara
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H02H9/00 ; H05K13/02 ; B66C1/42
Abstract:
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.
Information query
IPC分类:
