发明授权
- 专利标题: Structure of a semiconductor chip having a conductive layer
- 专利标题(中): 具有导电层的半导体芯片的结构
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申请号: US778881申请日: 1991-12-26
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公开(公告)号: US5288948A公开(公告)日: 1994-02-22
- 发明人: Yasuhiro Fukuda , Tetsuhiko Sugahara , Norio Hirashita , Mitsuhiro Matsuo , Minoru Saito , Masayuki Kobayakawa , Fumitaka Yokoyama
- 申请人: Yasuhiro Fukuda , Tetsuhiko Sugahara , Norio Hirashita , Mitsuhiro Matsuo , Minoru Saito , Masayuki Kobayakawa , Fumitaka Yokoyama
- 申请人地址: JPX Tokyo
- 专利权人: Oki Electric Industry Co., Ltd.
- 当前专利权人: Oki Electric Industry Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-160926 19890626; JPX1-119669[U] 19891016
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H05K1/00
摘要:
In order to prevent the occurrence of corrosion due to the sliding of a relatively wide aluminum conductive layer (12) such as a power source conductive layer or a ground conductive layer, formed on a semiconductor substrate (11), breakage of a lower conductive layer due to the sliding of an upper aluminum conductive layer (12) in case of a multilayer interconnection, and the creation of voids in the lower aluminum conductive layer due to the moisture beneath the relatively wide metal conductive layer in case of a multi layer interconnection etc., the conductive layer structure is constructed so that the conductive layer (12) relatively great in width is divided into several conductive layer portions and so that the width of each of the divided conductive layer portions is in a range of 10 .mu.m to 40 .mu.m.
公开/授权文献
- USPP10303P New Guinea Impatiens plant named `Lopinga` 公开/授权日:1998-03-24
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