发明授权
- 专利标题： Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same
- 专利标题（中）： 悬臂式位移元件，扫描隧道显微镜或使用其的信息处理装置
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申请号： US895621申请日： 1992-06-09
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公开(公告)号： US5357108A公开(公告)日： 1994-10-18
- 发明人: Yoshio Suzuki , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Keisuke Yamamoto , Yasuhiro Shimada
- 申请人： Yoshio Suzuki , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Keisuke Yamamoto , Yasuhiro Shimada
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-165282 19910611
- 主分类号： G01B21/30
- IPC分类号： G01B21/30 ; B81B3/00 ; G01N27/00 ; G01N37/00 ; G01Q10/04 ; G01Q60/10 ; G01Q60/16 ; G01Q70/08 ; G01Q70/16 ; G01Q80/00 ; G11B9/00 ; G11B9/14 ; H01J37/28 ; H01L41/09 ; H01J37/26
摘要：
A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
公开/授权文献
- US5989427A Method of degassing biological filters 公开/授权日：1999-11-23
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