发明授权
- 专利标题: Chromatically compensated particle-beam column
- 专利标题(中): 色谱补偿粒子束柱
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申请号: US109976申请日: 1993-08-20
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公开(公告)号: US5369279A公开(公告)日: 1994-11-29
- 发明人: Frederick W. Martin
- 申请人: Frederick W. Martin
- 专利权人: Martin; Frederick W.
- 当前专利权人: Martin; Frederick W.
- 主分类号: H01J37/145
- IPC分类号: H01J37/145 ; H01J37/153 ; H01J3/26
摘要:
A particle-beam column comprising a needle-type ions source such as a liquid metal ion source, one or more round lenses, and a plurality of interleaved quadrupole lenses, by means of which the chromatic aberration of the column may be reduced or entirely compensated. Also an ion-beam column comprising a liquid alloy ion source, interleaved quadrupole lenses, and a Wien velocity filter, whereby a focused beam of ions of a single atomic number may be produced. Such columns produce a more finely focused beam than columns based only on electrostatic lenses, and allow increased lens apertures and larger beam currents.
公开/授权文献
- US6117930A Resin systems for organosilicon-containing compositions 公开/授权日:2000-09-12
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