公开(公告)号：US4590379A

公开(公告)日：1986-05-20

申请号：US418794

申请日：1982-09-16

申请人： Frederick W. Martin

发明人： Frederick W. Martin

IPC分类号： H01J3/14 ,  H01J37/147 ,  H01J29/58 ,  H01J29/70

CPC分类号： H01J37/1474 ,  H01J3/14

摘要： The process of achromatic deflection by substantially uniform, crossed electric and magnetic fields with certain magnitudes. When the magnetic force is opposite to the electric force and twice as large, deflection is independent of particle velocity. An achromatic deflector produced by proper excitation of the poles of an achromatic quadrupole lens by means of suitable power supplies, without additional parts within the lens. An achromatic quadrupole lens having no yoke and only four electrodes, suitable for deflections varying at high frequency.

摘要翻译： 基本均匀，交叉的电场和磁场具有一定幅度的消色差偏转过程。 当磁力与电力相反并且两倍大时，偏转与粒子速度无关。 通过合适的电源适当地激励无彩色四极透镜的极点产生的无彩色偏转器，而镜片内没有附加部件。 没有轭的消色差四极透镜，只有四个电极，适用于高频变化的偏转。

公开(公告)号：US4002103A

公开(公告)日：1977-01-11

申请号：US484699

申请日：1974-07-01

申请人： Frederick W. Martin

发明人： Frederick W. Martin

IPC分类号： F01L29/00 ,  F01L31/00

CPC分类号： F01L29/00

摘要： The piston of a pneumatic cylinder is reciprocated with a controllable dwell time at each end of its stroke, under the control of a digital fluidic circuit which responds to the termination of exhaust flow at the end of each piston stroke to initiate the reverse piston stroke. The air for driving the piston is supplied alternately to opposite ends of the piston through respective cylinder ports, by way of a corresponding pair of pilot valves which are controlled by the fluidic circuit so that one or the other of the pilot valves may supply driving air to the piston at any time. Whenever the piston is in motion, a stream of exhaust air flows through the exhaust port ahead of the piston, and this exhaust stream acts through the fluidic control circuit to maintain the pilot valves in their then-existing states; when the exhaust stream stops at the end of a piston stroke, the fluidic circuit responds to produce a pneumatic pulse delayed by a controllable time with respect to termination of exhaust flow, and this delayed pulse triggers a two-state fluidic device to its opposite state; this in turn reverses the states of the pilot valves so that the other pilot valve now supplies driving air to the opposite end of the piston to drive it in the opposite direction. Reciprocation can be "turned off" by supplying a simulated exhaust stream to the fluidic circuit. Fluidic outputs indicative of the direction of piston movement and of whether reciprocation is occurring are also provided.

摘要翻译： 在数字流体回路的控制下，气动缸的活塞在其行程的每一端具有可控的停留时间往复运动，数字流体回路在每个活塞行程结束时响应终止排气流以启动反向活塞行程。 用于驱动活塞的空气通过相应的气缸端口交替地供应到活塞的相对端，通过由流体回路控制的相应的一对先导阀，使得一个或另一个先导阀可以供应驱动空气 随时到活塞。 每当活塞运动时，排气的流动流过活塞前方的排气口，并且该排气流通过流体控制回路作用，以将先导阀保持在其当时的状态; 当排气流在活塞行程结束时停止时，流体回路响应于产生延迟相对于排气流终止的可控时间的气动脉冲，并且该延迟脉冲触发双态流体装置处于相反状态 ; 这又反转了先导阀的状态，使得另一个先导阀现在将驱动空气供给到活塞的相对端，以沿相反的方向驱动它。 通过向流体回路供给模拟排气流可以“往返”。 还提供了指示活塞运动方向和是否正在进行往复运动的流体输出。

公开(公告)号：US4352985A

公开(公告)日：1982-10-05

申请号：US76573

申请日：1979-09-18

申请人： Frederick W. Martin

发明人： Frederick W. Martin

IPC分类号： H01J37/256 ,  H01J37/26

CPC分类号： H01J37/256

摘要： A scanning ion microscope is described in which the prior arts of scanning microscopy and achromatic quadrupole lens design as perfected for electrons are utilized for massive high-energy positive ions. Because the DeBroglie wavelength of the massive ions is smaller than the wavelength of electrons, diffraction in the objective lens is reduced. In principle resolution better than one Angstrom can be achieved. Because of the copious production of X-rays and Auger electrons in the specimen by such ions, specimens of atomic dimensions can be examined with a minimum of radiation damage by the ions. The specifically new, novel, and useful feature of this invention is the use of properly focused high-energy heavy-ion beams and the detection of single atomic events in the specimen, which together enable much greater sensitivity and resolution than attainable by other means.

摘要翻译： 描述了扫描离子显微镜，其中用于电子的完美扫描显微镜和消色差四极透镜设计的现有技术用于大量高能正离子。 由于大离子的DeBroglie波长小于电子的波长，物镜中的衍射减小。 原则上分辨率可以超过一埃即可实现。 由于通过这种离子在样品中产生X射线和俄歇电子，因此可以用离子的最小辐射损伤来检查原子尺寸的标本。 本发明的具体新颖，新颖和有用的特征是使用适当聚焦的高能重离子束和检测样品中的单一原子事件，这些可以使得比通过其他方法可以获得更大的灵敏度和分辨率。

公开(公告)号：US4088895A

公开(公告)日：1978-05-09

申请号：US813888

申请日：1977-07-08

申请人： Frederick W. Martin

发明人： Frederick W. Martin

IPC分类号： G01Q10/00 ,  G11C11/23 ,  G11C17/16

CPC分类号： G11C11/23 ,  G11C17/16

摘要： The invention is a memory for use in computing machines, in which the presence of a stored bit of information in a substrate is detected by a scanned ion beam of high brightness focused to a very small diameter. Bits of 4000 Angstrom dimension may be written in times as short as 100 nanoseconds by means of ion beams, and read out in times shorter than one nanosecond. A memory with such a bit size having a capacity of 10.sup.8 bits occupies 4 .times. 4 mm.sup.2 of substrate surface. By detecting the charge of high-energy ions transmitted through a thin substrate, bits smaller than 1000 Angstroms in dimension may be detected with good signal-to-noise ratio in less than 1 nanosecond.

摘要翻译： 本发明是一种用于计算机的存储器，其中通过聚焦到非常小直径的高亮度的扫描离子束来检测存储在衬底中的位置的信息。 4000埃尺寸的位可以通过离子束写入短达100纳秒的时间，并以小于一纳秒的时间读出。 具有108位容量的这种位大小的存储器占据衬底表面的4×4mm 2。 通过检测通过薄衬底传输的高能离子的电荷，可以以小于1纳秒的良好信噪比来检测小于1000埃的尺寸的位。

公开(公告)号：US5369279A

公开(公告)日：1994-11-29

申请号：US109976

申请日：1993-08-20

申请人： Frederick W. Martin

发明人： Frederick W. Martin

IPC分类号： H01J37/145 ,  H01J37/153 ,  H01J3/26

CPC分类号： H01J37/153 ,  H01J37/145 ,  H01J2237/04926 ,  H01J2237/057 ,  H01J2237/0805 ,  H01J2237/1534

摘要： A particle-beam column comprising a needle-type ions source such as a liquid metal ion source, one or more round lenses, and a plurality of interleaved quadrupole lenses, by means of which the chromatic aberration of the column may be reduced or entirely compensated. Also an ion-beam column comprising a liquid alloy ion source, interleaved quadrupole lenses, and a Wien velocity filter, whereby a focused beam of ions of a single atomic number may be produced. Such columns produce a more finely focused beam than columns based only on electrostatic lenses, and allow increased lens apertures and larger beam currents.

摘要翻译： 包括诸如液体金属离子源的针型离子源，一个或多个圆形透镜和多个交错四极透镜的粒子束柱，借此可以减小或完全补偿色谱的色差 。 还有一种离子束柱，其包括液体合金离子源，交错四极透镜和维恩速度滤波器，由此可以产生单个原子序数的聚焦离子束。 这样的列产生比仅基于静电透镜的列更精细聚焦的光束，并且允许增加透镜孔径和较大的光束电流。

公开(公告)号：US4555666A

公开(公告)日：1985-11-26

申请号：US379736

申请日：1982-05-19

申请人： Frederick W. Martin

发明人： Frederick W. Martin

IPC分类号： H05H5/00 ,  H01J23/00 ,  H01J23/34

CPC分类号： H05H5/00

摘要： A high voltage particle accelerator and an energy analyzer fed back to the accelerator, in which the beam of extremely small diameter from a particle source of the field-emission or field-ionization type and the energy analyzer function to produce precisely defined high voltages; use of such an accelerator and focusing lenses to produce a microbeam with reduced chromatic aberration; and production of a microbeam by use of such an accelerator and focusing lenses of the achromatic quadrupole type, further compensated for aperture aberration.

摘要翻译： 高压粒子加速器和反馈到加速器的能量分析器，其中来自场致发射或场致电型的粒子源的极小直径的束和能量分析器用于产生精确定义的高电压; 使用这种加速器和聚焦透镜来产生具有降低的色差的微束; 以及通过使用这种无色四极杆类型的加速器和聚焦透镜来生产微束，进一步补偿孔径像差。

公开(公告)号：US4236073A

公开(公告)日：1980-11-25

申请号：US801072

申请日：1977-05-27

申请人： Frederick W. Martin

发明人： Frederick W. Martin

IPC分类号： H01J37/04 ,  H01J37/256 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/256

摘要： A scanning ion microscope is described in which the prior arts of scanning microscopy and achromatic quadrupole lens design as perfected for electrons are utilized for massive high-energy positive ions. Because the DeBroglie wavelength of the massive ions is smaller than the wavelength of electrons, diffraction in the objective lens is reduced. In principle resolution better than one Angstrom can be achieved. Because of the copious production of X-rays and Auger electrons in the specimen by such ions, specimens of atomic dimensions can be examined with a minimum of radiation damage by the ions. The specifically new, novel, and useful feature of this invention is the use of properly focused high-energy heavy-ion beams and the detection of single atomic events in the specimen, which together enable much greater sensitivity and resolution than attainable by other means.

摘要翻译： 描述了扫描离子显微镜，其中用于电子的完美扫描显微镜和消色差四极透镜设计的现有技术用于大量高能正离子。 由于大离子的DeBroglie波长小于电子的波长，物镜中的衍射减小。 原则上分辨率可以超过一埃即可实现。 由于通过这种离子在样品中产生X射线和俄歇电子，因此可以用离子的最小辐射损伤来检查原子尺寸的标本。 本发明的具体新颖，新颖和有用的特征是使用适当聚焦的高能重离子束和检测样品中的单一原子事件，这些可以使得比通过其他方法可以获得更大的灵敏度和分辨率。