发明授权
- 专利标题: Electrical characteristics measurement method and measurement apparatus therefor
- 专利标题(中): 电气特性测量方法及其测量装置
-
申请号: US937790申请日: 1992-09-02
-
公开(公告)号: US5374888A公开(公告)日: 1994-12-20
- 发明人: Wataru Karasawa
- 申请人: Wataru Karasawa
- 申请人地址: JPX
- 专利权人: Tokyo Electron Kabushiki Kaisha
- 当前专利权人: Tokyo Electron Kabushiki Kaisha
- 当前专利权人地址: JPX
- 优先权: JPX3-254637 19910905
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; G01R1/073 ; H01L21/66 ; G01R1/04
摘要:
A method for positioning and testing an object to be tested wherein the surface of an object to be tested for electrical characteristics is brought into contact with a test probe. The side of the object opposite the surface to be tested is held by a suction device on the end of one of many arms which are attached to a rotating shaft. The object is then transported to a position to bring it into contact with the test probe where testing is performed to determine whether or not the object is faulty. If necessary, the arms are manipulated in an up and down and an in and out direction with respect to the shaft, and the suction device rotated, to maintain the object to be tested in a proper orientation.
公开/授权文献
信息查询