发明授权
- 专利标题: Electron lens
- 专利标题(中): 电子透镜
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申请号: US145161申请日: 1993-11-03
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公开(公告)号: US5442182A公开(公告)日: 1995-08-15
- 发明人: Toshiro Kubo , Toshiyuki Ohashi , Mikio Ichihashi , Yuji Sato
- 申请人: Toshiro Kubo , Toshiyuki Ohashi , Mikio Ichihashi , Yuji Sato
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-321483 19921106
- 主分类号: G01Q30/02
- IPC分类号: G01Q30/02 ; G01Q30/20 ; H01J37/141
摘要:
An electron lens comprising a first exciting coil, a second exciting coil, a casing for encompassing the first and second exciting coils, and an excitation control apparatus for controlling the excitation state of at least the first exciting coil independently of the second exciting coil. The excitation control apparatus independently controls currents applied to the first and second exciting coils, respectively. At this time, exothermy of each coil can be kept constant and thermal deformation of the casing can be prevented by keeping the sum of the absolute values of the currents applied to the coils.
公开/授权文献
- US6075729A High-speed static random access memory 公开/授权日:2000-06-13