发明授权
- 专利标题: High density pattern template: materials and processes for the application of conductive pastes
- 专利标题(中): 高密度图案模板:应用导电浆料的材料和工艺
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申请号: US118010申请日: 1993-09-08
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公开(公告)号: US5460921A公开(公告)日: 1995-10-24
- 发明人: Douglas A. Cywar , Charles R. Davis , Thomas P. Duffy , Frank D. Egitto , Paul J. Hart , Gerald W. Jones , Edward McLeskey
- 申请人: Douglas A. Cywar , Charles R. Davis , Thomas P. Duffy , Frank D. Egitto , Paul J. Hart , Gerald W. Jones , Edward McLeskey
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; H05K1/09 ; H05K3/00 ; H05K3/10 ; H05K3/12 ; H05K3/40 ; H05K3/46 ; G03C5/00
摘要:
The present invention provides a method of ablative photodecomposition and forming metal pattern which attains high resolution, is convenient, and employs non-halogenated solvents. The present invention is directed to a process for forming a metal pattern, preferably circuitization on an organic substrate, preferably on a circuit board or component thereof, which comprises coating the substrate with an ablatively-removable coating comprising a polymer resin preferably an acrylate polymer resin and preferably an ultraviolet absorber. A pattern is formed in the polymer coating corresponding to the desired metal pattern by irradiating at least a portion of the polymer coating with a sufficient amount of ultraviolet radiation to thereby ablatively remove the irradiated portion of the polymer coating. Next the patterned substrate is coated with a conductive metal paste to define the metal pattern, and the conductive metal paste is cured. The remaining polymer coating is removed by solvent stripping with non-halogenated solvents. The present invention further includes patterning electronic structures comprising multilayer circuitry using the above method. An excimer laser is used to form vias or through holes in the electronic structure while simultaneously patterning the polymer coating. This results in perfect alignment between the pattern formed in the polymer coating and the vias or through holes. High resolution circuitry is thus attainable when the electronic structure is subsequently metallized with a conductive metal paste.
公开/授权文献
- USD428560S Wire shower basket 公开/授权日:2000-07-25
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