发明授权
- 专利标题： Apparatus for the treatment of a solid body
- 专利标题（中）： 用于治疗固体的装置
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申请号： US150112申请日： 1994-02-01
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公开(公告)号： US5474642A公开(公告)日： 1995-12-12
- 发明人: Eugene Zorina , Vladimir Ivanov , Pavel Kulik , Alexis Logoshin , Alim Tchabanov , George Pavlov , Vecleslav Shvetchov
- 申请人： Eugene Zorina , Vladimir Ivanov , Pavel Kulik , Alexis Logoshin , Alim Tchabanov , George Pavlov , Vecleslav Shvetchov
- 申请人地址： NLX Amsterdam
- 专利权人： Overseas Publishers Association
- 当前专利权人： Overseas Publishers Association
- 当前专利权人地址： NLX Amsterdam
- 优先权： RUX4935913/25 19910524
- 主分类号： H05H1/34
- IPC分类号： H05H1/34 ; B23K10/00 ; C23C16/513 ; H01L21/302 ; H01L21/306 ; H01L21/3065 ; H01L21/31 ; H05H1/36 ; H05H1/40 ; H05H1/00
摘要：
Plasma treatment apparatus includes means to generate a plasma jet at atmospheric pressure, and means to control both the cross-sectional size of the jet and the relative speed of movement between the jet and a body being treated.
公开/授权文献
- US4907680A Semi-active damper piston valve assembly 公开/授权日：1990-03-13
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