Invention Grant
- Patent Title: Target for cathode sputtering and method of its production
- Patent Title (中): 阴极溅射靶及其制造方法
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Application No.: US106986Application Date: 1993-08-16
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Publication No.: US5480531APublication Date: 1996-01-02
- Inventor: Martin Weigert , Uwe Konietzka , Bruce Gehman
- Applicant: Martin Weigert , Uwe Konietzka , Bruce Gehman
- Applicant Address: DEX Frankfurt am Main
- Assignee: Degussa Aktiengesellschaft
- Current Assignee: Degussa Aktiengesellschaft
- Current Assignee Address: DEX Frankfurt am Main
- Priority: DEX4124471.0 19910724
- Main IPC: C04B35/01
- IPC: C04B35/01 ; C04B35/645 ; C23C14/34 ; C04B35/457 ; C23C14/08
Abstract:
Oxide-ceramic targets of partially reduced indium oxide-tin oxide mixtures are described. The targets provide high sputter performances, and they exhibit an essentially defined degree of reduction between 0.02 and 0.3, a density between 75 and 98% of the theoretical density and a specific electric resistance between 89.times.10.sup.-3 and 0.25.times.10.sup.-3 .OMEGA. cm. The degree of reduction must not deviate at any point on the target surface by more than 5% from the average degree of reduction of the target. The targets are produced by means of hot-pressing the oxide mixtures which were partially reduced beforehand in a special method step.
Public/Granted literature
- USD427934S Jewelry setting Public/Granted day:2000-07-11
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