- 专利标题： Microprobe, preparation thereof and electronic device by use of said microprobe
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申请号： US87537申请日： 1993-07-08
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公开(公告)号： US5482002A公开(公告)日： 1996-01-09
- 发明人: Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
- 申请人： Hisaaki Kawade , Haruki Kawada , Kunihiro Sakai , Hiroshi Matsuda , Yuko Morikawa , Yoshihiro Yanagisawa , Tetsuya Kaneko , Toshimitsu Kawase , Hideya Kumomi , Hiroyasu Nose , Eigo Kawakami
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX62-237499 19870924; JPX62-237500 19870924; JPX62-318951 19871218; JPX63-221403 19880906; JPX63-222232 19880907; JPX63-226420 19880912
- 主分类号： C30B25/04
- IPC分类号： C30B25/04 ; G01N27/00 ; G01Q30/04 ; G01Q60/00 ; G01Q70/08 ; G11B9/00
摘要：
A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.
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