发明授权
- 专利标题: Cantilever probe and apparatus using the same
- 专利标题(中): 悬臂式探头和使用其的仪器
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申请号: US253606申请日: 1994-06-03
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公开(公告)号: US5506829A公开(公告)日: 1996-04-09
- 发明人: Takayuki Yagi , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Yuji Kasanuki , Yasuhiro Shimada , Keisuke Yamamoto , Yoshio Suzuki
- 申请人: Takayuki Yagi , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Yuji Kasanuki , Yasuhiro Shimada , Keisuke Yamamoto , Yoshio Suzuki
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-411038 19901217; JPX2-406667 19901226; JPX3-187063 19910702
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; G01N27/00 ; G01Q10/00 ; G01Q10/04 ; G01Q60/00 ; G01Q60/16 ; G01Q70/14 ; G01Q80/00 ; G11B9/00 ; G11B9/14 ; H01J37/28 ; H01L21/66 ; H01L41/09 ; H01L41/22
摘要:
A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.