发明授权
- 专利标题: Infrared detecting element
- 专利标题(中): 红外线检测元件
-
申请号: US248154申请日: 1994-05-24
-
公开(公告)号: US5523564A公开(公告)日: 1996-06-04
- 发明人: Akira Yamada , Takehiko Sato , Yoshikazu Utsumi , Hisao Watarai
- 申请人: Akira Yamada , Takehiko Sato , Yoshikazu Utsumi , Hisao Watarai
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX5-121458 19930524; JPX5-335388 19931228
- 主分类号: G01J1/02
- IPC分类号: G01J1/02 ; G01J5/02 ; G01J5/34 ; H01L37/02 ; G01J5/20
摘要:
A thermal-type infrared detecting element is provided which includes an infrared detecting member, a support member supporting the infrared detecting member, a substrate holding the support member, and a low thermal conduction part intervening between the substrate and a central portion of the support member, the support member having a link portion in at least a peripheral portion thereof which links the support member to the substrate and slits and/or grooves defined at a location adjacent the link portion. This infrared detecting element exhibits excellent sensitivity and responsiveness while requiring no cooling, and a one- or two-dimensional array of the element assures clear imaging with less crosstalk.
公开/授权文献
- US6137431A Oversampled pipeline A/D converter with mismatch shaping 公开/授权日:2000-10-24
信息查询