发明授权
- 专利标题: Method and apparatus for testing integrated circuit chips
- 专利标题(中): 用于测试集成电路芯片的方法和装置
-
申请号: US163452申请日: 1993-12-07
-
公开(公告)号: US5523696A公开(公告)日: 1996-06-04
- 发明人: Richard G. Charlton , George C. Correla , Mark A. Couture , Gary R. Hill , Kibby B. Horsford , Anthony P. Ingraham , Michael D. Lowell , Voya R. Markovich , Gordon C. Osborne, Jr. , Mark V. Pierson
- 申请人: Richard G. Charlton , George C. Correla , Mark A. Couture , Gary R. Hill , Kibby B. Horsford , Anthony P. Ingraham , Michael D. Lowell , Voya R. Markovich , Gordon C. Osborne, Jr. , Mark V. Pierson
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corp.
- 当前专利权人: International Business Machines Corp.
- 当前专利权人地址: NY Armonk
- 主分类号: G01R1/04
- IPC分类号: G01R1/04 ; G01R1/073 ; G01R31/28
摘要:
A method and apparatus for testing semi-conductor chips is disclosed. The individual semiconductor chips have I/O contacts. The apparatus is provided with an interposer that has contacts corresponding to the contacts on the semiconductor chip. Both the chip and the interposer contacts can be any known type including metal ball, bumps, or tabs or may be provided with dendritic surfaces. The chip contacts are first brought into relative loose temporary contact with the contacts on the interposer and then a compressive force greater that 5 grams per chip contact is applied to the chip to force the chip contacts into good electrical contact with the interposer contacts. Testing of the chip is then performed. The tests may include heating of the chip as well as the application of signals to the chip contacts. After testing the chip is removed from the substrate.
信息查询