An ultrasonic motor includes a piezoelectric member which is excited in response to a driving signal, an elastic member in which a travelling wave is produced upon excitation of the piezoelectric member, and a movable member which is driven by the travelling wave produced in the elastic member. The surface of the elastic member which confronts the movable member includes first and second surfaces which extend along a travelling direction of the travelling wave. The first surface contacts the movable member. The second surface is formed at a lower position than the first surface by a predetermined step difference such that no polishing treatment is conducted on the second surface when a polishing treatment is conducted on the first surface. The first and the second surfaces are formed so that the amplitude of a travelling wave produced at the first surface is equal to the amplitude of a travelling wave produced at the second surface.