发明授权
- 专利标题： Jig for measuring the characteristics of a semiconductor, manufacturing method for the same, and usage of the same
- 专利标题（中）： 用于测量半导体特性的夹具及其制造方法及其用途
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申请号： US399220申请日： 1995-03-06
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公开(公告)号： US5559443A公开(公告)日： 1996-09-24
- 发明人: Yasuhiko Yokoya , Noboru Yamazaki , Mitsuo Nakamura , Syuuichi Hasuda , Eisaku Namai , Syuuzou Yamada
- 申请人： Yasuhiko Yokoya , Noboru Yamazaki , Mitsuo Nakamura , Syuuichi Hasuda , Eisaku Namai , Syuuzou Yamada
- 申请人地址： JPX Tokyo JPX Osaka
- 专利权人： Hitachi Chemical Company Ltd.,Yamada Den-On Co., Ltd.
- 当前专利权人： Hitachi Chemical Company Ltd.,Yamada Den-On Co., Ltd.
- 当前专利权人地址： JPX Tokyo JPX Osaka
- 优先权： JPX6-035708 19940307
- 主分类号： G01R31/26
- IPC分类号： G01R31/26 ; G01R1/073 ; G01R31/28 ; H01L21/66 ; G01R31/02
摘要：
A jig for measuring the characteristics of various semiconductors has three main elements including a first circuit board to be connected to a tester for measuring the characteristics of the semiconductor, a second circuit board to be connected to the semiconductor and an intermediate board located between the first and second circuit boards. The first and second circuit boards are electrically connected together through springy pins. These pins, secured to the first circuit board, extend through the intermediate board via through holes to contact with terminals located in the second circuit board. When measuring the characteristics of various semiconductors it is possible to use the jig by replacing only the second circuit board with a board adapted to the particular semiconductor being measured without replacing the other elements of the jig.
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