- 专利标题: Particle monitoring sensor
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申请号: US486169申请日: 1995-06-06
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公开(公告)号: US5565985A公开(公告)日: 1996-10-15
- 发明人: Boris Fishkin , Phil Salzman
- 申请人: Boris Fishkin , Phil Salzman
- 申请人地址: CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: CA Santa Clara
- 主分类号: G01J9/02
- IPC分类号: G01J9/02 ; G01N15/00 ; G01N15/02 ; G01N15/14 ; G01N21/15 ; G01N21/21 ; G01N21/49 ; G01N21/53 ; H01L21/02 ; G01N21/03
摘要:
An improved particle monitoring sensor is described which uses a variety of techniques to prolong the effective life of the optical surfaces within the particle monitoring sensor. Substantially inert purging gas is directed over the particle monitoring sensor windows, which are normally exposed to a harsh operating environment. The surfaces of these windows are heated by heating elements in direct thermal contact with the windows. In addition, a restrictive slit is placed over the detector window to reduce the exposed area and to increase the velocity of gas flowing over the window surface. While this slit reduces the detector's field of view, the signal loss is reduced by using a linearly polarized light source and aligning the elongated slit's major axis with the direction of polarization.
公开/授权文献
- US4636068A Change-over shutter for light-wave range finder 公开/授权日:1987-01-13
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