发明授权
- 专利标题: Method for fabricating metallization patterns on an electronic substrate
- 专利标题(中): 在电子基板上制造金属化图案的方法
-
申请号: US517392申请日: 1995-08-21
-
公开(公告)号: US5591480A公开(公告)日: 1997-01-07
- 发明人: Douglas H. Weisman , Thomas J. Swirbel , John K. Arledge
- 申请人: Douglas H. Weisman , Thomas J. Swirbel , John K. Arledge
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: G02F1/1345
- IPC分类号: G02F1/1345 ; H01L21/48 ; H03H3/08 ; H05K3/06 ; H05K3/24 ; B05D5/12 ; C23C14/00 ; C25D5/02 ; H01L21/465
摘要:
One method for fabricating solderable pads (406) onto a substrate (220) for direct chip attachment uses a multilayer metallization coating (500). The coating has a bottom layer (202) of indium-tin oxide, with an intermediate layer (204) of copper and a top layer (206) of indium-tin oxide. A masking layer (208) is deposited on the active display area (402) of the substrate, leaving the bonding pads uncovered. The revealed bonding pads are then plasma etched, using the polyimide as an etch resist, and the top layer of ITO is selectively removed to reveal the underlying copper layer. The exposed copper layer (204) is then plated with a solderable metal to the desired thickness to form bonding pads that may be used with direct chip attachment schemes.
公开/授权文献
- US5015904A Stator for an electrical machine 公开/授权日:1991-05-14
信息查询
IPC分类: