发明授权
- 专利标题: Method for testing and burning-in a semiconductor wafer
- 专利标题(中): 测试和燃烧半导体晶圆的方法
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申请号: US552448申请日: 1995-11-03
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公开(公告)号: US5597737A公开(公告)日: 1997-01-28
- 发明人: Stuart E. Greer , Joel P. Dietz , Aubrey K. Sparkman
- 申请人: Stuart E. Greer , Joel P. Dietz , Aubrey K. Sparkman
- 申请人地址: IL Schaumburg
- 专利权人: Motorola Inc.
- 当前专利权人: Motorola Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: G01R1/067
- IPC分类号: G01R1/067 ; G01R1/073 ; G01R31/28 ; H01L21/66
摘要:
Flip-chip is fast becoming the mounting method of choice in the semiconductor industry for dice having a high number of contacts. Since many applications require known-good-die, these flip-chip semiconductor dice must be tested and burned-in. By testing and burning-in the semiconductor wafers prior to solder bumping, the probe tips (42, 44, 46 & 48) can contact the hard planar surface of the under-bump-metallurgy (40) on each bonding pad (14) for easier and more reliable contact and hence test results. The probe tips can be either of an array (42 & 44) or cantilevered needle (46 & 48) type. Blunt probe tips (42 & 48) are well-suited to making contact on the shoulder of each bonding pad of each semiconductor die, while sharp probe tips (44 & 46) are preferable for contacting the center of each bonding pad. Solder bumping is performed post-testing.
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