发明授权
US5621532A Laser scanning microscope utilizing detection of a far-field diffraction pattern with 2-dimensional detection 失效
激光扫描显微镜利用二维检测的远场衍射图案的检测

  • 专利标题: Laser scanning microscope utilizing detection of a far-field diffraction pattern with 2-dimensional detection
  • 专利标题(中): 激光扫描显微镜利用二维检测的远场衍射图案的检测
  • 申请号: US381414
    申请日: 1995-01-31
  • 公开(公告)号: US5621532A
    公开(公告)日: 1997-04-15
  • 发明人: Hiroshi OokiTomoya Noda
  • 申请人: Hiroshi OokiTomoya Noda
  • 申请人地址: JPX Tokyo
  • 专利权人: Nikon Corporation
  • 当前专利权人: Nikon Corporation
  • 当前专利权人地址: JPX Tokyo
  • 优先权: JPX6-304795 19941208
  • 主分类号: G01N21/27
  • IPC分类号: G01N21/27 G02B21/00 G01N21/00
Laser scanning microscope utilizing detection of a far-field diffraction
pattern with 2-dimensional detection
摘要:
A laser scanning microscope provided with a laser light source, an illuminating optical system for condensing the light from the laser light source to form a light spot on a specimen, a scanning device for causing relative movement of the light spot with respect to the specimen, a photodetector for measuring the amount of light transmitted or reflected by the specimen, and an optical system with positive refraction power for guiding the light beam, transmitted or reflected by the specimen, to the light-receiving plane of the photodetector, wherein the photodetector is composed of a two-dimensional image sensor provided in a position displaced from the conjugate point of the light spot by such an amount that the light beam forms a far-field diffraction pattern of the specimen on the light-receiving plane of the photodetector.
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