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    Laser scanning microscope utilizing detection of a far-field diffraction pattern with 2-dimensional detection
    2.
    发明授权
    Laser scanning microscope utilizing detection of a far-field diffraction pattern with 2-dimensional detection 失效
    激光扫描显微镜利用二维检测的远场衍射图案的检测

    公开(公告)号：US5621532A

    公开(公告)日：1997-04-15

    申请号：US381414

    申请日：1995-01-31

    申请人： Hiroshi Ooki ,  Tomoya Noda

    发明人： Hiroshi Ooki ,  Tomoya Noda

    IPC分类号： G01N21/27 ,  G02B21/00 ,  G01N21/00

    CPC分类号： G02B21/002

    摘要： A laser scanning microscope provided with a laser light source, an illuminating optical system for condensing the light from the laser light source to form a light spot on a specimen, a scanning device for causing relative movement of the light spot with respect to the specimen, a photodetector for measuring the amount of light transmitted or reflected by the specimen, and an optical system with positive refraction power for guiding the light beam, transmitted or reflected by the specimen, to the light-receiving plane of the photodetector, wherein the photodetector is composed of a two-dimensional image sensor provided in a position displaced from the conjugate point of the light spot by such an amount that the light beam forms a far-field diffraction pattern of the specimen on the light-receiving plane of the photodetector.

    摘要翻译： 一种设置有激光光源的激光扫描显微镜，用于聚集来自激光光源的光以在样本上形成光点的照明光学系统，用于使光斑相对于样本相对移动的扫描装置， 光检测器，用于测量样本透射或反射的光量;以及具有正折射力的光学系统，用于将由样本透射或反射的光束引导到光电检测器的光接收面，其中光电检测器 由设置在从光点的共轭点偏离的位置的二维图像传感器构成，光量在光检测器的光接收面上形成样本的远场衍射图案。

    Confocal microscope
    4.
    发明授权
    Confocal microscope 有权
    共焦显微镜

    公开(公告)号：US07369309B2

    公开(公告)日：2008-05-06

    申请号：US11429998

    申请日：2006-05-09

    申请人： Tomoko Ujike ,  Tomoya Noda

    发明人： Tomoko Ujike ,  Tomoya Noda

    IPC分类号： G02B21/06

    CPC分类号： G02B21/0032 ,  G02B26/0833

    摘要： A confocal microscope with improved light use efficiency is provided. Thus, the confocal microscope has a section which concentrates illumination light to a target point of a specimen and non-target points adjacent thereto for simultaneous illumination; a section which receives light entering into a light reception portion conjugated with the target point, without distinguishing light emitted from the target point and light emitted from the non-target points, and outputs a light reception signal according to the intensity of the light; a section which changes the number of non-target points and successively captures the light reception signals before and after the change in the number of the target points; and a section which generates a confocal signal according to intensity of light emitted from the target point, based on a relationship between the captured light reception signals and the number of non-target points.

    摘要翻译： 提供了具有改善的光利用效率的共聚焦显微镜。 因此，共焦显微镜具有将照明光集中到样本的目标点和与其相邻的非目标点的部分，用于同时照明; 接收入射到与目标点共轭的光接收部分的光的部分，而不区分从目标点发射的光和从非目标点发射的光，并且根据光的强度输出光接收信号; 改变非目标点的数量并在目标点的数目的改变之前和之后连续地捕获光接收信号的部分; 以及基于所捕获的光接收信号和非目标点的数量之间的关系，根据从目标点发射的光的强度来生成共焦信号的部分。

    Confocal microscope
    5.
    发明申请
    Confocal microscope 有权
    共焦显微镜

    公开(公告)号：US20070014001A1

    公开(公告)日：2007-01-18

    申请号：US11429998

    申请日：2006-05-09

    申请人： Tomoko Ujike ,  Tomoya Noda

    发明人： Tomoko Ujike ,  Tomoya Noda

    IPC分类号： G02B21/00

    CPC分类号： G02B21/0032 ,  G02B26/0833

    摘要： A confocal microscope with improved light use efficiency is provided. Thus, the confocal microscope has a section which concentrates illumination light to a target point of a specimen and non-target points adjacent thereto for simultaneous illumination; a section which receives light entering into a light reception portion conjugated with the target point, without distinguishing light emitted from the target point and light emitted from the non-target points, and outputs a light reception signal according to the intensity of the light; a section which changes the number of non-target points and successively captures the light reception signals before and after the change in the number of the target points; and a section which generates a confocal signal according to intensity of light emitted from the target point, based on a relationship between the captured light reception signals and the number of non-target points.

    摘要翻译： 提供了具有改善的光利用效率的共聚焦显微镜。 因此，共焦显微镜具有将照明光集中到样本的目标点和与其相邻的非目标点的部分，用于同时照明; 接收入射到与目标点共轭的光接收部分的光的部分，而不区分从目标点发射的光和从非目标点发射的光，并且根据光的强度输出光接收信号; 改变非目标点的数量并在目标点的数目的改变之前和之后连续地捕获光接收信号的部分; 以及基于所捕获的光接收信号和非目标点的数量之间的关系，根据从目标点发射的光的强度来生成共焦信号的部分。

    Wave surface aberration measurement device, wave surface aberration measurement method, and projection lens fabricated by the device and the method
    6.
    发明授权
    Wave surface aberration measurement device, wave surface aberration measurement method, and projection lens fabricated by the device and the method 失效
    波面像差测量装置，波面像差测量方法以及通过该装置和方法制造的投影透镜

    公开(公告)号：US06693704B1

    公开(公告)日：2004-02-17

    申请号：US09670013

    申请日：2000-09-26

    申请人： Hiroshi Ooki ,  Tomoya Noda

    发明人： Hiroshi Ooki ,  Tomoya Noda

    IPC分类号： G01J100

    CPC分类号： G01M11/0257 ,  G01J9/00 ,  G01M11/0285 ,  G03F7/706

    摘要： A method and apparatus for measuring a wave front aberration of a projection lens with high precision and a related calibration method. The apparatus includes: either a light source and an element producing a first point source in combination with the light source or a first point source generating part; a magnifying projection optical system projecting and magnifying a point image of the first point source projected by a test object; a detector detecting the magnified point image projected and magnified by the magnifying projection optical system; a supporting member supporting the magnifying projection optical system and the detector; a calculating part calculating a wave front aberration; and either a second point source producing element or a second point source generating part.

    摘要翻译： 用于以高精度测量投影透镜的波前像差的方法和装置以及相关的校准方法。 该装置包括：光源和产生与光源或第一点源产生部分组合的第一点光源的元件; 放大投影光学系统，投影并放大由被测对象投影的第一点源的点图像; 检测器，其检测由放大投影光学系统投影和放大的放大点图像; 支撑放大投影光学系统和检测器的支撑构件; 计算波前像差的计算部分; 以及第二点源产生元件或第二点源生成部件。