发明授权
- 专利标题: Bonding scheme using group VB metallic layer
- 专利标题(中): 使用VB族金属层的接合方案
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申请号: US438296申请日: 1995-05-10
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公开(公告)号: US5622305A公开(公告)日: 1997-04-22
- 发明人: Donald D. Bacon , Cheng-Hsuan Chen , Ho S. Chen , Avishay Katz , King L. Tai
- 申请人: Donald D. Bacon , Cheng-Hsuan Chen , Ho S. Chen , Avishay Katz , King L. Tai
- 申请人地址: NJ Murray Hill
- 专利权人: Lucent Technologies Inc.
- 当前专利权人: Lucent Technologies Inc.
- 当前专利权人地址: NJ Murray Hill
- 主分类号: B23K35/00
- IPC分类号: B23K35/00 ; H01L21/58 ; H01L23/14 ; H01L23/373 ; B23K31/02 ; B23K1/20
摘要:
A method for bonding one body to another, such as a laser device to a submount, uses a metallic layer composed of a Group VB metal, such as niobium, sandwiched between a non-metallic layer and solder layer formed by an approximate Au-Sn eutectic layer. Advantageously the Group VB layer is formed at a submount temperature of less than approximately 201.degree. C., advantageously less than approximately 125.degree. C., and preferably less than approximately 101.degree. C.--advantageously to a thickness in the approximate range 0.05 .mu.m to 0.2 .mu.m, or even thinner if pinholes do not develop. The non-metallic layer is located on one of the bodies, and the other body has a metallic coating advantageously capped with an Au layer.
公开/授权文献
- US3938268A Index system 公开/授权日:1976-02-17
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