发明授权
- 专利标题: Semiconductor device with columns
- 专利标题(中): 具有列的半导体器件
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申请号: US648828申请日: 1996-05-16
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公开(公告)号: US5627390A公开(公告)日: 1997-05-06
- 发明人: Shigenobu Maeda , Yasuo Inoue , Hirotada Kuriyama , Shigeto Maegawa , Kyozo Kanamoto , Toshiaki Iwamatsu
- 申请人: Shigenobu Maeda , Yasuo Inoue , Hirotada Kuriyama , Shigeto Maegawa , Kyozo Kanamoto , Toshiaki Iwamatsu
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX6-112997 19940526
- 主分类号: H01L27/10
- IPC分类号: H01L27/10 ; H01L21/77 ; H01L21/8242 ; H01L21/84 ; H01L27/06 ; H01L27/108 ; H01L27/12 ; H01L29/78 ; H01L29/786 ; H01L29/76 ; H01L29/94 ; H01L31/119
摘要:
A first impurity diffusion layer forms one of source/drain regions and also forms a bit line. A first semiconductor layer, a channel semiconductor layer and a second semiconductor layer, which forms the other of source/drain regions and also forms a storage node, are disposed on the first impurity diffusion layer. A capacitor insulating film is disposed on a second conductive layer. A cell plate is disposed on a storage node with the capacitor insulating film therebetween. A capacitance of the bit line is reduced, and a dynamic random access memory thus constructed performs a high-speed operation.
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