发明授权
US5628564A Method and apparatus for wavevector selective pyrometry in rapid thermal
processing systems
失效
快速热处理系统中波矢选择性测温法的方法和装置
- 专利标题： Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems
- 专利标题（中）： 快速热处理系统中波矢选择性测温法的方法和装置
-
申请号： US412278申请日： 1995-03-28
-
公开(公告)号： US5628564A公开(公告)日： 1997-05-13
- 发明人: Zsolt Nenyei , Andreas Tillmann , Heinrich Walk
- 申请人： Zsolt Nenyei , Andreas Tillmann , Heinrich Walk
- 申请人地址： DEX Kirchheim
- 专利权人： AST Elekronik GmbH
- 当前专利权人： AST Elekronik GmbH
- 当前专利权人地址： DEX Kirchheim
- 优先权： DEX4414391.5 19940426
- 主分类号： G01J5/04
- IPC分类号： G01J5/04 ; G01J5/08
摘要：
A method and apparatus for optical pyrometry in a Rapid Thermal Processing (RTP) System, whereby the radiation used to heat the object to be processed in the RTP system is in part specularly reflected from specularly reflecting surfaces and is incident on the object with a particular angular distribution, and the thermal radiation from the object is measured at an angles different from the angle where the incident radiation specularly reflected from the surface of the object is a maximum.
公开/授权文献
- US4987758A Burglarproof lock 公开/授权日：1991-01-29
信息查询
