Invention Grant
- Patent Title: Preparation method for lead-titanium based thin film
- Patent Title (中): 铅钛基薄膜的制备方法
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Application No.: US539518Application Date: 1995-10-05
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Publication No.: US5637352APublication Date: 1997-06-10
- Inventor: Wan-in Lee , Jun-ki Lee , Seshu B. Desu
- Applicant: Wan-in Lee , Jun-ki Lee , Seshu B. Desu
- Applicant Address: KRX Suwon-Kyungki-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KRX Suwon-Kyungki-Do
- Priority: KRX199425903 19941010; KRX199431300 19941125
- Main IPC: C01G21/02
- IPC: C01G21/02 ; C07F7/00 ; C07F7/24 ; C23C16/40 ; C30B25/00 ; C30B29/32 ; H01B3/00 ; H01G4/33 ; H01L21/822 ; H01L27/04 ; H01L41/187
Abstract:
An organometallic lead precursor, represented by following formula:L.sub.x.Pb(THD).sub.2 [I]wherein L is an electron donor ligand selected from the group consisting of NR.sub.3 (R=H, CH.sub.3) gas and Cl.sub.2 gas; THD denotes 2,2',6,6'-tetramethyl-3,5-heptanedione; and x is in the range of 0.5 to 2, is prepared by flowing a gas phase electron donor into a bubbler containing bis (2,2',6,6'-tetramethyl-3,5-heptanedione)Pb at a predetermined temperature, to synthesize, in-situ, an adduct. The precursor exhibits a remarkable improvement in volatility, and in stability at the vaporization point.Lead-titanium based thin films prepared from the precursor, display superior reproducibility and reliability.
Public/Granted literature
- USD335391S Head mounted umbrella Public/Granted day:1993-05-11
Information query
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