发明授权
US5644124A Photodetector with a multilayer filter and method of producing the same
失效
具有多层过滤器的光电检测器及其制造方法
- 专利标题： Photodetector with a multilayer filter and method of producing the same
- 专利标题（中）： 具有多层过滤器的光电检测器及其制造方法
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申请号： US646729申请日： 1996-05-01
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公开(公告)号： US5644124A公开(公告)日： 1997-07-01
- 发明人: Toshimasa Hamada , Masaru Iwasaki , Tetsuya Hanamoto , Shohichi Katoh , Takahiro Funakoshi , Koji Miyake , Masumi Nakamichi
- 申请人： Toshimasa Hamada , Masaru Iwasaki , Tetsuya Hanamoto , Shohichi Katoh , Takahiro Funakoshi , Koji Miyake , Masumi Nakamichi
- 申请人地址： JPX Osaka
- 专利权人： Sharp Kabushiki Kaisha
- 当前专利权人： Sharp Kabushiki Kaisha
- 当前专利权人地址： JPX Osaka
- 优先权： JPX5-163522 19930701
- 主分类号： H01L31/0232
- IPC分类号： H01L31/0232 ; G02B5/28 ; H01L31/0203 ; H01L31/0216 ; H01J3/14
摘要：
Disclosed is a photodetector with a multilayer filter. A light-receiving substrate is mounted on a recessed portion of a ceramic stem. An electrode pad is formed on a P-type layer of the light-receiving substrate while another electrode pad is formed on an N-type layer of the light-receiving substrate. An optical multilayer filter is formed on the light-receiving substrate except the regions of the electrode pads. Further, an epoxy transparent resin is poured into the recessed portion of the stem and then cured, so that a resin portion to cover the light-receiving substrate is formed. The optical multilayer filter is formed of amorphous low refractive index films made of SiC.sub.2 and amorphous high refractive index films made of TiO.sub.2. The amorphous high and low refractive index films are alternately stacked.
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