发明授权
US5656092A Apparatus for capturing and removing contaminant particles from an
interior region of an ion implanter
失效
用于从离子注入机的内部区域捕获和去除污染物颗粒的装置
- 专利标题: Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter
- 专利标题(中): 用于从离子注入机的内部区域捕获和去除污染物颗粒的装置
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申请号: US574242申请日: 1995-12-18
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公开(公告)号: US5656092A公开(公告)日: 1997-08-12
- 发明人: Julian G. Blake , Robert Becker , David Chipman , Mary Jones , Lyudmila Menn , Frank Sinclair , Dale K. Stone
- 申请人: Julian G. Blake , Robert Becker , David Chipman , Mary Jones , Lyudmila Menn , Frank Sinclair , Dale K. Stone
- 申请人地址: OH Cleveland
- 专利权人: Eaton Corporation
- 当前专利权人: Eaton Corporation
- 当前专利权人地址: OH Cleveland
- 主分类号: C23C14/48
- IPC分类号: C23C14/48 ; H01J37/16 ; H01J37/18 ; H01J37/30 ; H01J37/317 ; H01L21/265 ; C23C16/00
摘要:
A method of capturing and removing contaminant particles moving within an evacuated interior region of an ion beam implanter is disclosed. The steps of the method include: providing a particle collector having a surface to which contaminant particles readily adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter in combination with a particle collector for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.
公开/授权文献
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