Method for capturing and removing contaminant particles from an interior
region of an ion implanter
    1.
    发明授权
    Method for capturing and removing contaminant particles from an interior region of an ion implanter 失效
    从离子注入机的内部区域捕获和去除污染物颗粒的方法

    公开(公告)号:US5670217A

    公开(公告)日:1997-09-23

    申请号:US762320

    申请日:1996-12-09

    摘要: A method of capturing and removing contaminant particles moving within an evacuated interior region of an ion beam implanter is disclosed. The steps of the method include: providing a particle collector having a surface to which contaminant particles readily adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter in combination with a particle collector for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.

    摘要翻译: 公开了一种捕获和去除在离子束注入机的抽空的内部区域内移动的污染物颗粒的方法。 该方法的步骤包括:提供具有污染物颗粒容易粘附的表面的颗粒收集器; 将颗粒收集器固定到注入机,使得颗粒粘附表面与在内部区域内移动的污染物颗粒流体连通; 并且在预定时间段之后从所述注入机移除所述颗粒收集器。 还公开了一种与用于捕获和去除在离子束穿过的注入器的抽空的内部区域中移动的污染物颗粒的离子注入机,该颗粒收集器包括污染物颗粒易于粘附的表面和用于 将颗粒收集器可释放地固定到注入机,使得颗粒粘附表面与注入机的抽空的内部区域流体连通。

    Apparatus for capturing and removing contaminant particles from an
interior region of an ion implanter
    2.
    发明授权
    Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter 失效
    用于从离子注入机的内部区域捕获和去除污染物颗粒的装置

    公开(公告)号:US5656092A

    公开(公告)日:1997-08-12

    申请号:US574242

    申请日:1995-12-18

    摘要: A method of capturing and removing contaminant particles moving within an evacuated interior region of an ion beam implanter is disclosed. The steps of the method include: providing a particle collector having a surface to which contaminant particles readily adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter in combination with a particle collector for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.

    摘要翻译: 公开了一种捕获和去除在离子束注入机的抽空的内部区域内移动的污染物颗粒的方法。 该方法的步骤包括:提供具有易于粘附污染物颗粒的表面的颗粒收集器; 将颗粒收集器固定到注入机,使得颗粒粘附表面与在内部区域内移动的污染物颗粒流体连通; 并且在预定时间段之后从所述注入机移除所述颗粒收集器。 还公开了一种与用于捕获和去除在离子束穿过的注入器的抽空的内部区域中移动的污染物颗粒的离子注入机,该颗粒收集器包括污染物颗粒易于粘附的表面和固定装置 将颗粒收集器可释放地固定到注入机,使得颗粒粘附表面与注入机的抽空的内部区域流体连通。

    Snap-lock vision frame assembly
    4.
    发明授权
    Snap-lock vision frame assembly 失效
    锁定视觉框架组装

    公开(公告)号:US5987844A

    公开(公告)日:1999-11-23

    申请号:US153096

    申请日:1998-09-14

    IPC分类号: E06B3/58 E04C2/38

    CPC分类号: E06B3/5892

    摘要: A vision frame assembly for use in fire-rated structures such as doors andalls. The frame assembly includes a pair of opposed frame members that snap-fit into a plurality of resilient latching clips mounted in the door or wall. The latching clips include mounting members to mount the clip to the door or wall and spring finger elements having differing lengths. The unique configuration of the spring finger elements makes the frame assembly adaptable to wide tolerance variations from different manufactures of doors, walls, and other fire-rated structures.

    摘要翻译: 用于防火结构(如门和墙壁)的视觉框架组件。 框架组件包括一对相对的框架构件,其卡扣配合到安装在门或壁中的多个弹性闭锁夹中。 锁定夹包括用于将夹子安装到门或壁的安装构件以及具有不同长度的弹簧指形元件。 弹簧指元件的独特构造使得框架组件适应于门,墙壁和其他防火结构的不同制造商的宽容差变化。