发明授权
US5691593A Piezoelectric/electrostrictive actuator having at least one
piezoelectric/electrostrictive film
失效
具有至少一个压电/电致伸缩膜的压电/电致伸缩致动器
- 专利标题： Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
- 专利标题（中）： 具有至少一个压电/电致伸缩膜的压电/电致伸缩致动器
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申请号： US392083申请日： 1995-02-22
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公开(公告)号： US5691593A公开(公告)日： 1997-11-25
- 发明人: Yukihisa Takeuchi , Koji Kimura , Masato Komazawa
- 申请人： Yukihisa Takeuchi , Koji Kimura , Masato Komazawa
- 申请人地址： JPX JPX
- 专利权人： NGK Insulators, Ltd.,Seiko Epson Corporation
- 当前专利权人： NGK Insulators, Ltd.,Seiko Epson Corporation
- 当前专利权人地址： JPX JPX
- 优先权： JPX1-178747 19890711; JPX2-011174 19900120
- 主分类号： B41J2/14
- IPC分类号： B41J2/14 ; B41J2/16 ; H01H57/00 ; H01L41/09 ; H01L41/314 ; H01L41/335 ; H01L41/39 ; H01L41/08
摘要：
A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.
公开/授权文献
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