发明授权
- 专利标题： Apparatus and method for patterning a surface
- 专利标题（中）： 用于图案化表面的装置和方法
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申请号： US608022申请日： 1996-03-04
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公开(公告)号： US5725788A公开(公告)日： 1998-03-10
- 发明人: George N. Maracas , Ronald N. Legge , Herbert Goronkin , Lawrence N. Dworsky
- 申请人： George N. Maracas , Ronald N. Legge , Herbert Goronkin , Lawrence N. Dworsky
- 申请人地址： IL Schaumburg
- 专利权人： Motorola
- 当前专利权人： Motorola
- 当前专利权人地址： IL Schaumburg
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; B05D1/18 ; B05D1/28 ; G03F7/00 ; G03F7/16 ; H01L21/027 ; H01L21/033 ; H01L21/3065 ; H01L21/308 ; B44C1/22
摘要：
An apparatus (95) and method for patterning a surface of an article (30), the apparatus (95) including a large-area stamp (50) for forming a self-assembled monolayer (36) (SAM) of a molecular species (38) on the surface (34) of a layer (32) of resist material, which is formed on the surface of the article (30). The large-area stamp (50) includes a layer (52) of an elastomer and has, embedded within it, mechanical structures (68, 80) which stiffen the large-area stamp (50) and deform it to control the stamped patterns. The method includes the steps of: forming a layer (32) of resist material is on the surface of the article (30), utilizing the large-area stamp (50) to form the SAM (36) on the surface (34) of the layer (32) of resist material, etching the layer (32) of resist material, and thereafter etching or plating the surface of the article (30).
公开/授权文献
- US4537139A Grate of incinerator 公开/授权日：1985-08-27
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