发明授权
- 专利标题: Control apparatus, a stage apparatus and a hard disk servo writer apparatus including a robust stabilizing compensator
- 专利标题(中): 控制装置,平台装置以及包括稳健补偿器的硬盘伺服写入装置
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申请号: US401677申请日: 1995-03-10
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公开(公告)号: US5726879A公开(公告)日: 1998-03-10
- 发明人: Mikio Sato
- 申请人: Mikio Sato
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX6-042458 19940314
- 主分类号: G05B13/02
- IPC分类号: G05B13/02 ; G03F7/20 ; G05B5/01 ; G05B13/04 ; G05B19/19 ; G05D3/12 ; G05B19/18 ; G11B21/02
摘要:
Provided is high-performance H.sub..infin. control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.
公开/授权文献
- US4416776A Oil filter construction 公开/授权日:1983-11-22
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