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US5726879A Control apparatus, a stage apparatus and a hard disk servo writer apparatus including a robust stabilizing compensator 失效
控制装置,平台装置以及包括稳健补偿器的硬盘伺服写入装置

Control apparatus, a stage apparatus and a hard disk servo writer
apparatus including a robust stabilizing compensator
摘要:
Provided is high-performance H.sub..infin. control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.
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